2003
DOI: 10.1063/1.1619557
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Thermal expansion coefficient of hydrogenated amorphous carbon

Abstract: The coefficient of thermal expansion (CTE) of hydrogenated amorphous carbon (a-C:H) was investigated as a function of the concentration of sp2 hybridization. The CTE, determined using the thermally induced bending technique, depends on the concentration of sp2 bonded carbon, increasing to the value of graphite as the sp2 concentration approaches 100%. By using a combination of the thermally induced bending technique and nanohardness measurements, we extract separately the Young’s modulus and Poisson’s ratio of… Show more

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Cited by 92 publications
(38 citation statements)
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“…These elastic modulus values are in good agreement with the values obtained from hydrogenated amorphous carbon films with sp 2 -bonded carbon fraction of ϳ0.65, by Marques et al 39 The low measured hardness of each EBID film is consistent with a-C:H films deposited from hydrocarbon plasma at low bias voltage ͑200 V ; H Ͻ 5 GPa͒. 40,41 It is well known that the mechanical properties of plasma-deposited a-C:H depend mainly on the energy with which the hydrocarbon precursors impact the growing surface and the amount of hydrogen in the film.…”
Section: Resultssupporting
confidence: 81%
See 1 more Smart Citation
“…These elastic modulus values are in good agreement with the values obtained from hydrogenated amorphous carbon films with sp 2 -bonded carbon fraction of ϳ0.65, by Marques et al 39 The low measured hardness of each EBID film is consistent with a-C:H films deposited from hydrocarbon plasma at low bias voltage ͑200 V ; H Ͻ 5 GPa͒. 40,41 It is well known that the mechanical properties of plasma-deposited a-C:H depend mainly on the energy with which the hydrocarbon precursors impact the growing surface and the amount of hydrogen in the film.…”
Section: Resultssupporting
confidence: 81%
“…The projected areas obtained by the AFM from the indentation were used to calibrate the hardness and elastic modulus values. Poisson's ratio for hydrogenated amorphous carbon films was measured to be 0.25± 0.05 by Marques et al 39 and this Poisson's ratio value was used to calculate the elastic modulus using the obtained nanoindentation load-displacement data. With the indentation projected area calibration, the hardness and elastic modulus values of the films deposited under 3, 12, and 20 kV were fitted as 3.6± 0.3, 4.0± 0.2, and 4.4± 0.2 GPa, and 34.3± 3.4, 46.3± 2.3, and 59.5± 2.5 GPa, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…To verify the validity of Eq. (6), C f = 35 J m À2 for DLC films [11,12] is used (other physical constants are listed in Table 1). We thus estimate the average crack spacing (equal to the average size of the film segments), and a good agreement between experiment and theory is attained, as seen in Fig.…”
Section: Discussionmentioning
confidence: 99%
“…This FEA is performed using thermal and static-structural analysis in ANSYS 16.2 Academic Version (ANSYS, Inc., Canonsburg, PA, USA, 2015). The material properties used for FEA [49][50][51][52][53][54] are mentioned in Table S1 of the Supplementary Materials. Here, the resultant stress is given by Equation (1) and is popularly known as Stoney's equation [55,56].…”
Section: Physical Reasons Of the Statistically-significant Termsmentioning
confidence: 99%