Thermal microsensor with a.c. heating for gas-pressure measurements

Grudin, O M; Frolov, G. A.; Katsan, Ivan I.; Lupina, Boris I.

doi:10.1016/s0924-4247(97)01571-9

Cited by 3 publications

(4 citation statements)

References 5 publications

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“…The adequacy of the proposed advanced model is confirmed by the correspondence of the calculated data obtained in the work with the results of experimental studies of similar structures performed by the authors in previous works [20,29] and in the works of other authors [10,16].…”

Section: Verification Of the Model And Simulationsupporting

confidence: 79%

“…The operation of the sensor is based on the internal properties of a non-stationary heated structure, including a membrane and overheated gas in the condition of unsteady heat exchange [19][20][21]. A bridge technique is used in which the modulated power is dissipated on the membrane and the overheating temperature amplitude relative to the matching thermoresistor is detected.…”

Section: Absolute Gas Pressure Sensormentioning

confidence: 99%

“…The physical principles of the measurement process are described in detail in [20,21]. It should be noted that an increase in the concentration of molecules in volume on the thermal conductivity may not occur, since with the increase in specific heat capacity simultaneously the length of free run of molecules decreases.…”

Section: Simulation To Optimize the Multifunctional Design Of Thementioning

confidence: 99%

See 2 more Smart Citations

Modeling of Multifunctional Thermoresistive Transduser Used Heat Exchange Technology

Osinov

Zavorotnyi

Lupyna

et al. 2019

Mìkrosist. elektron. akust.

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The physical and technical characteristics, structural and topological aspects of the micromechanical thermoresistor active heating transdusers synthesis for fluid (gas and liquid) parameters determination are considered. All transducers are based on a single MEMS (Micro Electro Mechanical System) structure and differ in functionality due to different operating modes and different principles for determining fluid parameters. It allows the development of multifunctional sensors based on a single hardware, which includes a typical MEMS structure and mass production microprocessor, for example, PSoC (Programmable System On Chip). The transducers mathematical models acceptable for the COMSOL simulation library and designing of information electronics devices with the registration of various physical parameters are proposed. The analytical calculations on the basis of the proposed models for a gas flow sensor of the temperature dependence from the fluid flow velocity in the MEMS structure was performed. The proposed models can be used for the operation analytical description and computing of devices based on the use of thermoelectric processes in micro-scale structures. Ref. 29, fig. 3.

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Section: Verification Of the Model And Simulationsupporting

confidence: 79%

Section: Absolute Gas Pressure Sensormentioning

confidence: 99%

Section: Simulation To Optimize the Multifunctional Design Of Thementioning

confidence: 99%

See 1 more Smart Citation

Modeling of Multifunctional Thermoresistive Transduser Used Heat Exchange Technology

Osinov

Zavorotnyi

Lupyna

et al. 2019

Mìkrosist. elektron. akust.

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“…The sensitive element of the microsensor is a K type thermocouple (Chromel/Alumel) with a diameter of 25.4 µm. The measurement technique is based on the succession of an heating period and a cooling phase and is frequently used in the literature [11][12][13][14]. The block diagram of the sensor (called microthermoanemometer) and its associated electronic are represented in Figure 1.…”

Section: Description Of the Sensormentioning

confidence: 99%

Microthermocouples Sensors for Velocity and Temperature Measurements in Gas Flow

Lanzetta

Gavignet

Amrane

et al. 2012

Volume 2: Applied Fluid Mechanics; Electromechanical Systems and Mechatronics; Advanced Energy Systems; Thermal Engineering; Hu

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This paper presents the development of two classes of sensors based on microthermocouples with different wire diameters (from 7.6 μm to 25.4 μm). The first one uses the pulsed-wire technique for the couple velocity/temperature measurement. These sensors are used with three different techniques we developed in our laboratory: the time of flight method, the oscillation frequency method and the phase method. Because the purpose of this kind of sensor is to be introduced in different microdevices, it is realized with two thermocouple wires and does not use the micromachining technologies. Its working principle is close to that of the hot wire anemometer and it presents the same advantages such as very small dimensions and weak response time. The sensor is developed in order to measure flows and temperatures in microsystems like small channels (width < 500 μm), microtubes (diameter < 53 μm) and small structures (volume < 100 μm3). The second class of sensors are based on the multi-wire thermocouple technique. In this paper we present a probe using two wires of same nature but different in diameter located close together at the measurement point. This probe is used to measure simultaneously the temperature and the velocity of flowing gas. Results will focus on oscillating flows of gas.

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