Thermal modelling of a WO3 ozone sensor response

Guérin, J.; Aguir, Khalifa; Bendahan, Marc; Lambert-Mauriat, C.

doi:10.1016/j.snb.2004.05.019

Cited by 41 publications

(23 citation statements)

References 14 publications

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“…Tungsten oxide (WO 3 ) thin films have been thoroughly examined because of their remarkable optical, electrical and electrochromic properties [6][7][8], which are used in smart windows, optical displays, and reflectance-modulating automobile rear-view mirrors [6]. WO 3 is also used as an active layer in gas sensors since it has the ability to decrease its high resistance when certain gasses are adsorbed [7,8].…”

Section: Introductionmentioning

confidence: 99%

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Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering

Mohamed

Anders

2007

Thin Solid Films

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Amorphous and partially crystalline WO 3 thin films were prepared by reactive dual magnetron sputtering and successively implanted by erbium ions with a fluence in the range from 7.7 × 10 14 to 5 × 10 15 ions/cm 2 . The electrical and optical properties were studied as a function of the film deposition parameters and the ion fluence. Ion implantation caused a strong decrease of the resistivity, a moderate decrease of the index of refraction and a moderate increase of the extinction coefficient in the visible and near infrared, while the optical band gap remained almost unchanged. These effects could be largely ascribed to ion-induced oxygen deficiency. When annealed in air, the already low resistivities of the implanted samples decreased further up to 70ºC, whereas oxidation, and hence a strong increase of the resistivity, was observed at higher annealing temperatures.

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Section: Introductionmentioning

confidence: 99%

“…WO 3 is also used as an active layer in gas sensors since it has the ability to decrease its high resistance when certain gasses are adsorbed [7,8]. Rare earth (Am, Cm, Nd and Eu) doped tungsten oxide bronzes were synthesized as inert matrices used in the study of transmutation of long-life actinide isotopes [9].…”

Section: Introductionmentioning

confidence: 99%

Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering

Mohamed

Anders

2007

Thin Solid Films

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“…This makes it suitable for use in a variety of applications such as smart windows, nonemissive display devices, variable reflectance mirrors, and variable emissivity surfaces [1,2]. WO 3 is also used as an active layer in gas sensors since it has the ability to decrease its high resistance when gasses are adsorbed [3,4]. Tungsten nitrides, on the other hand, are characterized by high melting point, high hardness, chemical inertness and good thermal stability [5].…”

Section: Introductionmentioning

confidence: 99%

“…The profilometer had experimental error of about ± 10 nm in determining the film thickness. RBS was carried out using a 1.95 MeV 4 He + ion beam generated by a 2.5 MeV Van de Graaff electrostatic accelerator. The samples were mounted on a two-axis goniometer.…”

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confidence: 99%

Structural, optical, and electrical properties of WOx(Ny) films deposited by reactive dual magnetron sputtering

Mohamed

Anders

2006

Surface and Coatings Technology

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Thin films of tungsten oxynitrides were prepared by dual magnetron sputtering of tungsten using argon/oxygen/nitrogen gas mixtures with various nitrogen/oxygen ratios.The presence of even relatively small amounts of oxygen led to close-to-stoichiometric WO 3 , with little incorporation of nitrogen, therefore the films were labeled as WO x (N y ). Oxygen had a great effect not only on the composition but on the structure of WO x (N y ) films, as shown by Rutherford backscattering and x-ray diffraction, respectively. Significant incorporation of nitrogen occurred only when the nitrogen partial pressure exceeded 89% of the total reactive gas pressure. Sharp changes in the stoichiometry, deposition rate, room temperature resistivity, electrical activation energy and optical band gap were observed when the nitrogen/oxygen ratio was high. The deposition rate increased from 0.31 to 0.89 nm/s, LBNL-59900 1 the room temperature resistivity decreased from 1.65 × 10 8 to 1.82 × 10 -2 Ωcm, the electrical activation energy decreased from 0.97 to 0.067 eV, and the optical band gap decreased from 3.19 to 2.94 eV upon nitrogen incorporation into the films. WO x (N y ) films were highly transparent as long as the nitrogen incorporation was low, and were brownish (absorbing) and partially reflecting as nitrogen incorporation became significant.

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“…Recent efforts have yielded a miniaturized and inexpensive chemical gas sensor (Guérin et al, 2005;Tang et al, 2006;Yamaguchi and Yang, 2004) with high reproducibility and a rapid reaction rate. Research, including that from our own group, working under size and price restraints, has produced a portable E-Nose based on a carbon black-polymer composite sensor array (Kim et al, 2005;Matzger et al, 2000).…”

Section: Introductionmentioning

confidence: 99%

A bio-inspired two-layer multiple-walled carbon nanotube–polymer composite sensor array and a bio-inspired fast-adaptive readout circuit for a portable electronic nose

Wang

Tang

Chiu

et al. 2011

Biosensors and Bioelectronics

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Thermal modelling of a WO3 ozone sensor response

Cited by 41 publications

References 14 publications

Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering

Physical properties of erbium implanted tungsten oxide films deposited by reactive dual magnetron sputtering

Structural, optical, and electrical properties of WOx(Ny) films deposited by reactive dual magnetron sputtering

A bio-inspired two-layer multiple-walled carbon nanotube–polymer composite sensor array and a bio-inspired fast-adaptive readout circuit for a portable electronic nose

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