Thermal Performance and Stability of Poly Si/Pt(Ni) Thin Film Temperature Sensors on GaAs

Lalinský, T.; Hrkut, P.; Mozolová, Ž.; Kováčik, Tomáš; Krajcer, Andrej

doi:10.1007/978-3-642-59497-7_347

Cited by 1 publication

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“…In order to suppress the interfacial interactions, a thin diffusion barrier layer has to be formed on the GaAs surface before Pt and Ni deposition. An undoped, highly resistive polysilicon (poly Si) thin film has been designed and tested as a diffusion barrier layer for Pt and Ni temperature sensors on GaAs [44]. RF sputtering and electron beam evaporation (EBE) combined with a lift-off technique were used to pattern a meander-like structure of resistance temperature sensors as shown in Fig.…”

Section: Temperature Sensorsmentioning

confidence: 99%

Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Zha

Mems/Nems

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Micro-Electro-Mechanical Systems (MEMS) design and manufacturing are inherently multi-physical and multi-disciplinary; no single person is able to perform a full development process for a MEM device or system. This chapter presents a web-enabled design platform for collaborative design of MEMS. The proposed web-based distributed object modeling and evaluation framework with client-knowledge server architecture, KS-DMME, allows multi-users/designers in different locations to participate in the same design process. Under this framework, concurrent integrated MEMS design and simulation models can be built using both local and distributed resources, and the design collaboration can be realized by exchanging services between modules based upon CORBA standard communication protocol. To facilitate the rapid construction of the concurrent integrated design models for MEMS, a prototype web-enabled design system, Web-MEMS Designer, is implemented through concurrent integration of multiple distributed and cooperative knowledge sources and software. By use of the developed prototype system, MEMS design and simulation can be carried out simultaneously and intelligently in an integrated but open design environment on the web. A case study of a microgripper design for micro robotic assembly systems is provided to illustrate how designers in different teams and organizations may participate and collaborate in MEMS design.

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Section: Temperature Sensorsmentioning

confidence: 99%

Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Zha

Mems/Nems

View full text Add to dashboard Cite

show abstract

Thermal Performance and Stability of Poly Si/Pt(Ni) Thin Film Temperature Sensors on GaAs

Cited by 1 publication

References 2 publications

Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS

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