2010
DOI: 10.1063/1.3402336
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Thermal Properties of Silicon Nitride Beams Below 1 Kelvin

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Cited by 3 publications
(3 citation statements)
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“…The expected temperature rise in the gold devices given by literature values of gold and SiN heat capacities is within a factor two of the measured temperature rise, which is reasonable given the uncertainties in the heat capacities of our SiN and gold. The expected temperature rise from the tantalum device is a factor of ten smaller than expected assuming the classical Debye phonon heat capacity for tantalum and typical heat capacities for SiN [14]. There are a number of possible reasons for this discrepancy.…”
mentioning
confidence: 88%
“…The expected temperature rise in the gold devices given by literature values of gold and SiN heat capacities is within a factor two of the measured temperature rise, which is reasonable given the uncertainties in the heat capacities of our SiN and gold. The expected temperature rise from the tantalum device is a factor of ten smaller than expected assuming the classical Debye phonon heat capacity for tantalum and typical heat capacities for SiN [14]. There are a number of possible reasons for this discrepancy.…”
mentioning
confidence: 88%
“…This gives an expected heat capacity of 0.06 pJ/K, after accounting for both the dielectric (LSN and ILD) and metal (Nb and Al) layers. [71][72][73] The heat capacity is set by island volume of about 30 000 μm 3 , which is much larger than the combined volume of the bolometer legs of about 5000 μm 3 for the longest leg bolometer. As a result, we expect that all the devices would have the same the heat capacity.…”
Section: Detector Fabricationmentioning
confidence: 99%
“…We fixed the island size to ∼100 µm by ∼500 µm for all the devices. The expected heat capacity is 0.059 pJ/K, accounting for the dielectric (LSN and ILD) and metal (Nb and Al) layers [24][25][26] . The heat capacity is set by island volume of about 30,000 µm 3 , which is much larger than the combined volume of the bolometer legs of about 5,000 µm 3 for the longest leg bolometer.…”
Section: Detector Fabricationmentioning
confidence: 99%