2014
DOI: 10.1016/j.surfcoat.2014.10.024
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Thermal stability and oxidation resistance of arc evaporated TiAlN, TaAlN, TiAlTaN, and TiAlN/TaAlN coatings

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Cited by 115 publications
(34 citation statements)
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“…The lower bound for the vacancy concentrations in (Ti,Al)N x with x ≈ 1 is the Schottky defect concentration, c M-vac = c N-vac = c Schottky . The x > 1 sample deposited using a poisoned target therefore exhibits a similar metal vacancy concentration as the one we estimated above based on the reported nitrogen loss during thermogravimetric analysis [13,14,54] and enables a direct comparison to the industrial state-of-theart. ERDA analysis of samples annealed at 850°C showed a slight decrease in nitrogen content by 0.3 at% for x > 1, 0.2 at% for x ≈ 1 and 0.9 at% for x < 1.…”
Section: Resultssupporting
confidence: 59%
See 1 more Smart Citation
“…The lower bound for the vacancy concentrations in (Ti,Al)N x with x ≈ 1 is the Schottky defect concentration, c M-vac = c N-vac = c Schottky . The x > 1 sample deposited using a poisoned target therefore exhibits a similar metal vacancy concentration as the one we estimated above based on the reported nitrogen loss during thermogravimetric analysis [13,14,54] and enables a direct comparison to the industrial state-of-theart. ERDA analysis of samples annealed at 850°C showed a slight decrease in nitrogen content by 0.3 at% for x > 1, 0.2 at% for x ≈ 1 and 0.9 at% for x < 1.…”
Section: Resultssupporting
confidence: 59%
“…These vacancies are important for thermal stability of metastable (Ti,Al)N x at higher temperatures since no energy for vacancy formation is needed for diffusion on the metal sublattice but only the activation energy for changing the atomic positions. A mass loss of up to 3 wt% has been observed during thermogravimetric analysis of (Ti,Al)N x at 1200°C [13,14,54] due to N 2 evaporation [14]. Assuming that this leads to stoichiometric nitrogen content in the remaining film, the nitrogen content in as-deposited (Ti,Al)N x can be estimated as up to x ≈ 1.11 resulting in c M-vac = 10% which is in good agreement with the predicted metal vacancy concentration of few percent, considering that atomic, excited and ionic nitrogen is present during synthesis which will increase the metal vacancy concentration.…”
Section: Resultsmentioning
confidence: 99%
“…This signifies that the defects caused by high ion energy bombardment in the presence of N vacancies, are more stable than at low energy bombardment, [57][58] opposite to Rogström et al 8 observations for the stoichiometric case Koller et al 59 have presented the idea that microstructure affects the phase separation of the thin film coatings. It was suggested that under-dense column boundaries caused by lowly biased coatings accelerates decomposition because they provide higher diffusion and reduce retarding forces against volume changes.…”
Section: B Thermal Stability Of Ti1-xalxnymentioning
confidence: 97%
“…Nb 0.73 Al 0.27 N has shown a maximum hardness value 33.5 GPa [68]. Concerning Ta 1−x Al x N alloys, only Ta 0.89 Al 0.11 N was investigated [70]. It has shown a singlephased cubic B1 solid solution in the as-deposited state, and has been found to be stable until 1100…”
Section: Ternary Pseudo-binary Nitride Alloysmentioning
confidence: 99%