Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization

Tsai, Ming Hung; Wang, Chun Wen; Tsai, Che-Wei; Shen, Wan Jui; Yeh, Jien Wei; Gan, Jon Yiew; Wu, Wen‐Wei

doi:10.1149/2.056111jes

Cited by 188 publications

(57 citation statements)

References 45 publications

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“…[34,82] Another example is the NbSiTaTiZr amorphous alloy. The crystallization temperature of NbSiTaTiZr is higher than 800 • C. [23] This temperature of stability is probably the highest among reported amorphous metals. The excellent structural stability comes not just from the above two reasons.…”

Section: High Temperatures Properties and Structuralmentioning

confidence: 97%

“…[2,20,21] It also contributes to the excellent performance of HEA coatings as diffusion barriers. [22,23] Moreover, it allows better high-temperature strength and structural stability, which are discussed in Section 5. For the same reason, HEAs are also expected to have outstanding creep resistance.…”

Section: Sluggish Diffusion Effectmentioning

confidence: 99%

“…The strain energy of the distorted lattice raises the overall free energy, leading to a reduced energy difference between defect-containing crystal/amorphous structure and the defect-free crystal. [23,108] Thus, the driving force to eliminate defects is reduced. There is much evidence for the good structural stability of HEAs.…”

Section: High Temperatures Properties and Structuralmentioning

confidence: 99%

“…NbSiTaTiZr was designed based on a free energy consideration. [23] Its composition was selected so that the non-crystalline random solid solution state has a low free energy. This lowers its driving force to crystallize into silicides.…”

Section: High Temperatures Properties and Structuralmentioning

confidence: 99%

“…HEA coatings/claddings can also be prepared by sputtering or other cladding techniques. [22,23,73,[133][134][135][136][137][138][139][140] In terms of the phase and crystal structure of HEAs, most of our knowledge is based on the as-cast state (after vacuum arc melting). Very little is known about the equilibrium phases and phase diagrams, but these are key to the design and development of HEAs.…”

Section: Corrosion Propertiesmentioning

confidence: 99%

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High-Entropy Alloys: A Critical Review

Tsai

Yeh

2014

Materials Research Letters

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2,637

940

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High-entropy alloys (HEAs) are alloys with five or more principal elements. Due to the distinct design concept, these alloys often exhibit unusual properties. Thus, there has been significant interest in these materials, leading to an emerging yet exciting new field. This paper briefly reviews some critical aspects of HEAs, including core effects, phases and crystal structures, mechanical properties, high-temperature properties, structural stabilities, and corrosion behaviors. Current challenges and important future directions are also pointed out.

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Section: High Temperatures Properties and Structuralmentioning

confidence: 97%

Section: Sluggish Diffusion Effectmentioning

confidence: 99%

Section: High Temperatures Properties and Structuralmentioning

confidence: 99%

Section: High Temperatures Properties and Structuralmentioning

confidence: 99%

Section: Corrosion Propertiesmentioning

confidence: 99%

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High-Entropy Alloys: A Critical Review

Tsai

Yeh

2014

Materials Research Letters

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2,637

940

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Phase Selection, Lattice Distortions, and Mechanical Properties in High‐Entropy Alloys

et al. 2020

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Increasing demand for improved physical, chemical, and mechanical properties led to the development of conventional alloys from single elements. These conventional alloys are made by selecting one or two major elements with desired properties, and other minor components are added to tune the properties to meet performance specifications. The conventional alloy design strategy is mainly based on the "solutesolvent" principle. However, another alloy design strategy based on multiprincipal elements in the near-equimolar ratio has recently been developed. In this multiprincipal element system, it is difficult to distinguish between the solute and the solvent, and various atoms are supposed to be randomly distributed in the crystal lattices (which has not been confirmed yet). This strategy, proposed by Yeh [1] and Cantor, [2] was based on the Boltzmann hypothesis of the relationship between entropy and system complexity. They proposed that the increased configurational entropy of mixing in alloys with multiple alloying elements in near-equiatomic proportions would overcome the enthalpy of compound formation, stabilizing solid solutions (SS) at the expense of intermetallics (IMs) during solidification. These multiprincipal element alloys are named "high entropy alloys" (HEAs), although the exact values of entropy in HEAs have not been experimentally measured yet. Since then, hundreds of HEAs with different combinations have been developed based on transition metals, refractory metals, and compound forming elements. [2-20] Most of these HEAs have been found to possess simple crystal structures such as the face-centered cubic (fcc) Fe-Co-Cr-Mn-Ni HEAs, [2] bodycentered cubic (bcc) Al-Co-Cr-Fe-Ni HEAs, [18] and the hexagonal close-pack (hcp) Ho-Dy-Y-Gd-Tb HEAs [6] when solidified from the melts. Experimental characterization techniques such as X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), differential scanning calorimetry (DSC), nanoindentation, tensile, wear-and corrosionresistance tests have been used to study the microstructureproperties correlations of HEAs. [3-50] These studies have revealed that HEAs possess superior properties, such as high hardness and strength, [23-29] superior corrosion and wear resistance, [3,30-35] good magnetic properties, [9,36-39,51] structural stability, [7,40,41] attractive mechanical properties at extreme temperature conditions, [21,42-47] and good electronic properties. [48,49] Yeh [50] proposed four core effects of HEAs, namely: 1) high-entropy effect; 2) sluggish diffusion effect; 3) sever lattice distortion effect; and 4) cocktail effect, in which the lattice distortion might be the key factor affecting the properties of HEAs. Although a complete understanding of lattice distortions in HEAs is still not established yet, significant progress in HEAs has been made recently.

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Crystalline Magnetic Anisotropy in High Entropy (Fe, Co, Ni, Cr, Mn)₃O₄ Oxide Driven by Single‐Element Orbital Anisotropy

Ke,

Chen,

Liu

et al. 2023

Adv Funct Materials

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The design of multicomponent materials has captured considerable attention due to its extraordinary ability to tailor functional properties. However, how a single element affects the behavior of the overall material has yet to be explored in depth. In this study, the heteroepitaxy of high entropy (Fe, Co, Ni, Cr, Mn)3O4 films with varying strain states are investigated in magnetic performance. It is discovered that the high entropy oxide thin film with compressive strain exhibits an effect of crystalline magnetic anisotropy. Diverse analyses provide a detailed understanding of high entropy magnetic oxide systems, including X‐ray diffraction, reciprocal space mapping, macroscopic magnetic characterization, X‐ray absorption spectroscopy (XAS), etc. Notably, the element‐specific XAS technique proves effective in uncovering the origin of the crystalline magnetic anisotropy. Due to the substrate‐induced epitaxial strain, the eg orbitals of Mn3+ form different energy levels, leading to different preferred electron occupancy. The exploration of magnetic properties in epitaxial high entropy oxide film is then raveled. By navigating the complexities introduced by the random atom distribution and intricate magnetic interactions, this study pioneers novel methodologies for probing the core physics of high entropy oxides.

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Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization

Cited by 188 publications

References 45 publications

High-Entropy Alloys: A Critical Review

High-Entropy Alloys: A Critical Review

Phase Selection, Lattice Distortions, and Mechanical Properties in High‐Entropy Alloys

Crystalline Magnetic Anisotropy in High Entropy (Fe, Co, Ni, Cr, Mn)₃O₄ Oxide Driven by Single‐Element Orbital Anisotropy

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Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization

Cited by 188 publications

References 45 publications

High-Entropy Alloys: A Critical Review

High-Entropy Alloys: A Critical Review

Phase Selection, Lattice Distortions, and Mechanical Properties in High‐Entropy Alloys

Crystalline Magnetic Anisotropy in High Entropy (Fe, Co, Ni, Cr, Mn)3O4 Oxide Driven by Single‐Element Orbital Anisotropy

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Product

Resources

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Crystalline Magnetic Anisotropy in High Entropy (Fe, Co, Ni, Cr, Mn)₃O₄ Oxide Driven by Single‐Element Orbital Anisotropy