1998
DOI: 10.1016/s0257-8972(98)00614-8
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Thermal stability of Al–O–N PVD diffusion barriers

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Cited by 77 publications
(31 citation statements)
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“…The continued interest in corundum alumina is based on its high performance in wear and corrosion resistance, [1±3] its high temperature insulating properties, [4] and its diffusion barrier properties. [5,6] Thin films of a-Al 2 O 3 are deposited using wet processes such as sol±gel, [2,3] spray coating, [7] or physical vapor deposition, [1,8,9] the thermal CVD process being the most often used. The classic way of producing alumina thin films by CVD is based on the hydrolysis of AlCl 3 with a mixture of H 2 and CO 2 gases at temperatures between 700 C and 1000 C.…”
Section: Introductionmentioning
confidence: 99%
“…The continued interest in corundum alumina is based on its high performance in wear and corrosion resistance, [1±3] its high temperature insulating properties, [4] and its diffusion barrier properties. [5,6] Thin films of a-Al 2 O 3 are deposited using wet processes such as sol±gel, [2,3] spray coating, [7] or physical vapor deposition, [1,8,9] the thermal CVD process being the most often used. The classic way of producing alumina thin films by CVD is based on the hydrolysis of AlCl 3 with a mixture of H 2 and CO 2 gases at temperatures between 700 C and 1000 C.…”
Section: Introductionmentioning
confidence: 99%
“…It has also been reported that diffusion of alloying elements in the substrate could lead to decrease in the mechanical properties of the Ni-based superalloy. 6) To prevent diffusion of Al into the substrate, a number of diffusion barrier coatings have been proposed; [7][8][9][10] however, after a relatively short oxidation time the barrier layer loses the layer structure, resulting in rapid, catastrophic oxidation behavior. Narita et al proposed a diffusion barrier coating with a duplex layer structure, containing the -phase of Re-Cr-Ni as the diffusion barrier layer.…”
Section: Introductionmentioning
confidence: 99%
“…An increase of the thermal efficiency in gas turbines is directly connected with a high gas inlet temperature and, therefore, leads to the increased thermal loads on the materials used for turbine components [1,2]. The use of the advanced Ni-based superalloy singly as turbine blade material is becoming difficult.…”
Section: Introductionmentioning
confidence: 99%
“…However, it has been observed that the alloying elements in bond coat would interdiffuse towards the substrate above 1273 K, leading to the undesired coating failure [2]. The bond coat serves as the reservoir of Al and Cr for the formation of the thermally grown oxide (TGO) which is a thin oxide layer between bond coat and the top ceramic coat.…”
Section: Introductionmentioning
confidence: 99%
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