Thermal stability of Al1−xInxN (0001) throughout the compositional range as investigated during in situ thermal annealing in a scanning transmission electron microscope

Pališaitis, Justinas; Hsiao, Ching‐Lien; Hultman, Lars; Birch, Jens; Persson, Per

doi:10.1016/j.actamat.2013.04.043

Cited by 14 publications

(20 citation statements)

References 31 publications

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“…3c (blue line) shows a shift of the E p value to ~18.1 eV (from original ~17.6 eV) inside the layers, which indicates a loss of In from the InAlN layers. It was previously shown that In can desorb through the surfaces of a thin TEM foil during high-temperature heating21, which the present cross-section sample symmetry would allow. Finally, the top and bottom In 0.72 Al 0.28 N layers are seen to have the same average E p as the other layers in the as-grown sample, while for the heated sample, these layers loose more In compared to the adjacent.…”

Section: Resultsmentioning

confidence: 68%

“…Hence, eventually there is no driving force for further decomposition after a prolonged heating cycle. The reduced In content domains are also expected to be stable at the present temperatures, as the thermal stability of InAlN is increased with increasing Al content 21 . Thus, the final product is a porous skeletal structure which does not evolve further, as seen in the STEM-HAADF images of the fully heated samples.…”

Section: Resultsmentioning

confidence: 91%

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Direct observation of spinodal decomposition phenomena in InAlN alloys during in-situ STEM heating

Pališaitis

Hsiao

Hultman

et al. 2017

Sci Rep

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The spinodal decomposition and thermal stability of thin In0.72Al0.28N layers and In0.72Al0.28N/AlN superlattices with AlN(0001) templates on Al2O3(0001) substrates was investigated by in-situ heating up to 900 °C. The thermally activated structural and chemical evolution was investigated in both plan-view and cross-sectional geometries by scanning transmission electron microscopy in combination with valence electron energy loss spectroscopy. The plan-view observations demonstrate evidence for spinodal decomposition of metastable In0.72Al0.28N after heating at 600 °C for 1 h. During heating compositional modulations in the range of 2–3 nm-size domains are formed, which coarsen with applied thermal budgets. Cross-sectional observations reveal that spinodal decomposition begin at interfaces and column boundaries, indicating that the spinodal decomposition has a surface-directed component.

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Section: Resultsmentioning

confidence: 68%

Section: Resultsmentioning

confidence: 91%

Direct observation of spinodal decomposition phenomena in InAlN alloys during in-situ STEM heating

Pališaitis

Hsiao

Hultman

et al. 2017

Sci Rep

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“…During growth, −30 V dc substrate bias was applied. Y x In 1−x N films were grown at a relatively low temperature of T s = 300 • C to avoid desorption of In from the surface of Y x In 1−x N [36,37]. AlN(0 0 0 1) buffer layer was deposited at T s = 900 • C in pure N 2 atmosphere.…”

Section: Methodsmentioning

confidence: 99%

Ab initio calculations and experimental study of piezoelectric Y In1−N thin films deposited using reactive magnetron sputter epitaxy

et al. 2016

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By combining theoretical prediction and experimental verification we investigate the piezoelectric properties of yttrium indium nitride (Y x In 1−x N). Ab-initio calculations show that the Y x In 1−x N wurtzite phase is lowest in energy among relevant alloy structures for 0 ≤ x ≤ 0.5. Reactive magnetron sputter epitaxy was used to prepare thin films with Y content up to x = 0.51. The composition dependence of the lattice parameters observed in the grown films is in agreement with that predicted by the theoretical calculations confirming the possibility to synthesize a wurtzite solid solution. An AlN buffer layer greatly improves the crystalline quality and surface morphology of subsequently grown Y x In 1−x N films. The piezoelectric response in films with x = 0.09 and x = 0.14 is observed using piezoresponse force microscopy. Theoretical calculations of the piezoelectric properties predict Y x In 1−x N to have comparable piezoelectric properties to Sc x Al 1−x N.

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“…The morphology of the as-grown samples were characterized by a LEO-1550 field-emission scanning electron microscopy (FE-SEM). Analyses of structural properties and compositional profiles were performed by θ/2θ XRD scan using a Philips 1820 Bragg-Bretano diffractometer as well as scanning transmission electron microscopy (STEM) and energy dispersive x-ray spectroscopy (EDX) using a FEI Tecnai G 2 TF 20 UT 200 kV FEG microscope [18,19].…”

mentioning

confidence: 99%

Nucleation and core-shell formation mechanism of self-induced InxAl1−xN core-shell nanorods grown on sapphire substrates by magnetron sputter epitaxy

Hsiao

Pališaitis

Persson

et al. 2016

Vacuum

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Nucleation and core-shell formation mechanism of self-induced InxAl1-xN core-shell nanorods grown on sapphire substrates by magnetron sputter epitaxy, Vacuum, 2016. 131, pp.39-43. http://dx.Nucleation of self-induced InxAl1-xN nanorod and core-shell structure formation by surface-induced phase separation have been studied at the initial growth stage. The growth of well-separated core-shell nanorods is only found in a transition temperature region in contrast to the result of thin film growth outside this region. Formation of multiple compositional domains, due to phase separation, after ~20 nm InxAl1-xN epilayer growth from sapphire substrate promotes the core-shell nanorod growth, showing a modified Stranski-Krastanov growth mode. The use of VN seed layer makes the initial growth of the nanorods directly at the substrate interface, revealing a Volmer-Weber growth mode.Different compositional domains are found on VN template surface to support that the phase separation takes place at the initial nucleation process and forms by a self-patterning effect. The nanorods were grown from In-rich domains and initiated the formation of coreshell nanorods due to spinodal decomposition of the InxAl1-xN alloy with a composition in the miscibility gap. *

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Thermal stability of Al1−xInxN (0001) throughout the compositional range as investigated during in situ thermal annealing in a scanning transmission electron microscope

Cited by 14 publications

References 31 publications

Direct observation of spinodal decomposition phenomena in InAlN alloys during in-situ STEM heating

Direct observation of spinodal decomposition phenomena in InAlN alloys during in-situ STEM heating

Ab initio calculations and experimental study of piezoelectric Y In1−N thin films deposited using reactive magnetron sputter epitaxy

Nucleation and core-shell formation mechanism of self-induced InxAl1−xN core-shell nanorods grown on sapphire substrates by magnetron sputter epitaxy

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