Thermal stability of nanolamellar fcc-Ti1-xAlxN grown by chemical vapor deposition

Tkadletz, Michael; Hofer, Christina; Wüstefeld, Christina; Schalk, Nina; Motylenko, Mykhaylo; Rafaja, David; Holzschuh, H.; Bürgin, Werner; Sartory, Bernhard; Mitterer, Christian; Czettl, Christoph

doi:10.1016/j.actamat.2019.05.044

Cited by 30 publications

(30 citation statements)

References 38 publications

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“…In Figure 5, detailed elemental maps collected from a representative nanolamellar region with cubic grains within the p-coating are presented. Al, Ti, and Cl maps and a line scan indicate a periodic variability in the composition of Al(Ti)N-Ti(Al)N bi-layers filling the cubic grains, as already discussed elsewhere [9,15]. In other words, the concentrations of Al and Ti change in an oscillatory fashion across the nanolamellar grains and the bilayers are non-stoichiometric [9].…”

Section: Chemical and Structural Analysis Of The Nanolamellaesupporting

confidence: 57%

“…We are aware of the possibility that the increasing of the working temperature during deposition process may have affected already deposited sublayers. On the other hand, so far published results on thermal stability [11,15] has shown only slight changes in the temperature interval, which was selected in our study (750-860 • C). Therefore, we do not expect trends observed in our study to be significantly affected by our deposition strategy.…”

Section: Properties Of T-coatingmentioning

confidence: 98%

“…The angular grains with cubic non-stoichiometric Al(Ti)N-Ti(Al)N bi-layers [9] represent the most interesting microstructural feature in the self-assembled nanolamellar Al x Ti 1−x N coatings, which predetermine their functional properties like relatively high hardness and excellent thermal stability [11,15]. The cubic nanolamellae are formed from the gas phase on {100}-faceted surfaces of growing grains as a result of a sequential epitaxial overgrowth during oscillating chemical reactions, as extensively discussed in Ref.…”

Section: Chemical and Structural Analysis Of The Nanolamellaementioning

confidence: 99%

“…Similar results have been reported also by Paseuth et al [14], who analyzed preferred orientation, thermal stability and cutting performance of Al-rich cubic Al x Ti 1−x N coatings prepared by LP-CVD. Cross-sectional microstructure, thermal stability, oxidation behavior, mechanical properties, and their mutual correlation were extensively analyzed by Tkadletz et al [15,16] and Saringer et al [17].…”

Section: Introductionmentioning

confidence: 99%

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Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1−xN Coatings

et al. 2021

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The correlation between structural properties of Al-rich self-assembled nano-lamellar AlxTi1−xN coatings and process parameters used during their chemical vapor deposition (CVD) remains unexplored. For this article, two gradient AlxTi1−xN coatings were prepared by a stepwise increase in temperature and pressure in the ranges of 750–860 °C and 1.56 to 4.5 kPa during the depositions at a constant composition of the process gas mixture. The cross-sectional properties of the coatings were analyzed using X-ray nanodiffraction (CSnanoXRD) and electron microscopy. Experimental results indicate that the variation of the process parameters results in changes in microstructure, grain morphology, elastic strain, nanolamellae’s chemistry and bi-layer period. At temperatures of ~750–800 °C and pressures of 2.5–4.5 kPa, preferably cubic nanolamellar grains are formed, whose microstructure correlates with the build-up of tensile stresses, which become relaxed in coating regions filled with nanocrystalline grains. CSnanoXRD superlattice satellite reflections indicate the period of the cubic Al(Ti)N-Ti(Al)N bilayers, which changes from 6.7 to 9 nm due to the temperature increase from 750 to ~810 °C, while it remains nearly unaffected by the pressure variation. In summary, our study documents that CVD process parameters can be used to tune microstructural properties of self-assembled AlxTi1−xN nanolamellae as well as the coatings’ grain morphology.

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Section: Chemical and Structural Analysis Of The Nanolamellaesupporting

confidence: 57%

Section: Properties Of T-coatingmentioning

confidence: 98%

Section: Chemical and Structural Analysis Of The Nanolamellaementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1−xN Coatings

et al. 2021

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“…Due to the respectable mechanical properties like high hardness, anti-corrosion, and superior oxidation resistance, Ti-Ai-N has attracted much attraction in dry and high speed cutting as the surface protection films for machine tools [1][2][3]. Nowadays, varieties of techniques have been developed for the fabrication of Ti-Al-N films including chemical vapor deposition [4], arc evaporation [5], ion plating [6], and reactive DC/RF sputtering [7]. During Ti-Al-N film deposition progress, the gas atmosphere is quite important and complex [8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Variation on the Microstructure and Mechanical Properties of Ti-Al-N Films Induced by RF-ICP Ion Source Enhanced Reactive Nitrogen Plasma Atmosphere

Xia

Liu

et al. 2020

Nanoscale Res Lett

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Acquiring the optimum growth conditions of Ti-Al-N films, the effects of gas atmosphere, especially the reactive plasma on the material microstructures, and mechanical properties are still a fundamental and important issue. In this study, Ti-Al-N films are reactively deposited by radio frequency inductively coupled plasma ion source (RF-ICPIS) enhanced sputtering system. Different nitrogen gas flow rates in letting into the ion source are adopted to obtain nitrogen plasma densities and alter deposition atmosphere. It is found the nitrogen element contents in the films are quite influenced by the nitrogen plasma density, and the maximum value can reach as high as 67.8% at high gas flow circumstance. XRD spectra and FESEM images indicate that low plasma density is benefit for the film crystallization and dense microstructure. Moreover, the mechanical properties like hardness and tribological performance are mutually enhanced by adjusting the nitrogen atmosphere.

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Precipitation-based grain boundary design alters Inter- to Trans-granular Fracture in AlCrN Thin Films

et al. 2022

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Thermal stability of nanolamellar fcc-Ti1-xAlxN grown by chemical vapor deposition

Cited by 30 publications

References 38 publications

Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1−xN Coatings

Effect of Pressure and Temperature on Microstructure of Self-Assembled Gradient AlxTi1−xN Coatings

Variation on the Microstructure and Mechanical Properties of Ti-Al-N Films Induced by RF-ICP Ion Source Enhanced Reactive Nitrogen Plasma Atmosphere

Precipitation-based grain boundary design alters Inter- to Trans-granular Fracture in AlCrN Thin Films

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