Thermal stability of sputter-deposited ZnO thin films

Song, Yi; Kim, E. S.; Kapila, A.

doi:10.1007/bf02659626

Cited by 15 publications

(7 citation statements)

References 7 publications

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“…Zn 2p peaks at about 1021.5 and 1044.5 eV with a constraint of 22.7 eV (Figure 8b), 22.9 eV (Figure 8c), and 23.16 eV (Figure 8d), depicting the presence of the metal oxide bond in ZnO. 13,42,43 The lower binding energy can be attributed to the broken bonds in ZnO due to the size reduction of ZnO. 44 All the samples have both oxygen peaks at 530.2 eV, which can be assigned to the lattice oxygen present in Pd−ZnO.…”

Section: + ← → ⎯⎯⎯⎯⎯mentioning

confidence: 99%

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Anjitha

Ahirwar

et al. 2022

ACS Appl. Electron. Mater.

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Continuous monitoring of gases at low concentrations is necessary for keeping track of emanations from coal mines as gas emissions prove to be a detrimental factor for people working in such environments. Therefore, there is a requirement to develop a selective CO sensor which can go down to the ppm level for initiating the triggering of an alarm system. With this objective, a selective CO (up to 20 ppm) sensor has been investigated with the exploration of different material combinations (Pd−ZnO) and optothermal activation techniques. The selectivity of target gases such as CO, CH 4 , and NH 3 has been a controversial topic among researchers as the sensing mechanism is almost similar in all the three cases. The major challenge to be addressed while designing a micro-electromechanical system-based gas sensor is the problem of reliability, cross-sensitivity, and selectivity, which stagnates the overall performance of the system. The optothermally activated sensor platform with suitable nanomaterials play a significant role in curtailing the above-mentioned issues. The present work implements Pd-doped nanocrystalline ZnO with defect-oriented active sites which are found to be highly efficacious in providing a sensor with a strong adsorption reaction and propelling the surface conversion kinetics. The sensor is optimized for selective CO sensing due to the interplay between the defect states on Pd−ZnO with optical and thermal activation. As a direct consequence, a reliable, robust, cost-effective, and CO-selective packaged gas sensor at approximately 3.5 W is realized. Simulation, optimization of the sensing nanomaterial, fabrication of a screen-printed integrated heater and sensing electrodes, thermo-optical excitation, detailed packaging, and characterization are discussed in this study. Thus, the present methodology to fabricate the CO-selective sensor is suitable for various applications where a robust, reliable, selective sensing performance is required. Detailed material characterization has been performed to analyze the sensing behavior of the grown nanomaterials (Pd−ZnO).

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Section: + ← → ⎯⎯⎯⎯⎯mentioning

confidence: 99%

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Anjitha

Ahirwar

et al. 2022

ACS Appl. Electron. Mater.

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“…This may imply that the ZnO nanostructured layer is stable during the reading process. The thermal stability of the sputter-deposited ZnO thin films has been reported by Song and coworkers., 11) and the out-diffusion of zinc atoms from ZnO films at a high temperature was verified to be negligible. We believe that the excellent nearfield effect comes from the nanostructure of the ZnO thin film.…”

mentioning

confidence: 89%

Study of a Super-Resolution Optical Structure: Polycarbonate/ZnS–SiO₂/ZnO/ZnS–SiO₂/Ge₂Sb₂Te₅/ZnS–SiO₂

Lin

Kao

Chang

et al. 2003

Jpn. J. Appl. Phys.

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A new super-resolution near-field optical structure was demonstrated. The structure, polycarbonate/ZnS-SiO 2 (130 nm)/ ZnO(15 nm)/ZnS-SiO 2 (30 nm)/Ge 2 Sb 2 Te 5 (15 nm)/ZnS-SiO 2 (20 nm), has the ability in recording the small marks beyond the diffraction limit. At a readout power of 5 mW, the carrier to noise ratio (CNR) of more than 33 dB was measured for the recorded marks with the size of 100 nm by a digital versatile disc (DVD) tester. Transmission electron microscope (TEM) images of such structure displayed local orderly nanograins in 15 nm ZnO thin film. Ensemble effects of these ZnO nanostructures of the active layer are the key of the near-field super-resolution.

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“…13.9 Interference pattern from a ZnO film on glass substrate visible portion of the spectrum. ZnO films are resistant against hydrogen plasma treatment and do not degrade when processed for solar cell applications [80][81][82][83][84]. Zinc (Zn) metal is cheaper and less toxic.…”

Section: Nanoparticle Transparent and Electrically Conducting Zinc Oxmentioning

confidence: 99%

Nanoparticle Films

Khan¹

2015

Handbook of Thin-Film Technology

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Thermal stability of sputter-deposited ZnO thin films

Cited by 15 publications

References 7 publications

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Study of a Super-Resolution Optical Structure: Polycarbonate/ZnS–SiO₂/ZnO/ZnS–SiO₂/Ge₂Sb₂Te₅/ZnS–SiO₂

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Thermal stability of sputter-deposited ZnO thin films

Cited by 15 publications

References 7 publications

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Design, Fabrication, and Packaging of an Optothermally Activated Nanocrystalline Pd–ZnO-Based Selective CO Sensor on a Screen-Printed In-Plane Heater

Study of a Super-Resolution Optical Structure: Polycarbonate/ZnS–SiO2/ZnO/ZnS–SiO2/Ge2Sb2Te5/ZnS–SiO2

Nanoparticle Films

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Study of a Super-Resolution Optical Structure: Polycarbonate/ZnS–SiO₂/ZnO/ZnS–SiO₂/Ge₂Sb₂Te₅/ZnS–SiO₂