2012
DOI: 10.1007/s00339-012-6905-7
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Thermally activated crystallization of Nb2O5 grown on Pt electrode

Abstract: The influence of the local crystallographic orientation of the polycrystalline bottom platinum electrode on the crystallization of niobium pentoxide thin films during their rapid thermal annealing was investigated by X-ray diffraction, X-ray reflectivity and transmission electron microscopy. The Nb 2 O 5 thin films under study were reactively sputtered in a mixed O 2 /Ar atmosphere and subsequently subjected to the annealing in argon atmosphere at temperatures ranging from 500 • C to 700 • C. The X-ray diffrac… Show more

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Cited by 9 publications
(3 citation statements)
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“…129,130 So far, sputtering has been the most reported PVD technique to deposit Nb 2 O 5 lms. Generally, Nb 2 O 5 lms can be obtained using direct current (DC) 72,[131][132][133][134][135][136] or radio frequency (RF) 18,132,[137][138][139][140][141][142][143] sputtering techniques with metallic niobium (Nb) 72,131,[133][134][135][138][139][140][141][142][144][145][146] or Nb 2 O 5 (ref. 18, 137 and 143) targets in the presence of carrier gases such as argon (Ar) in oxygen (O 2 ) environments.…”
Section: Physical Vapour Deposition (Pvd)mentioning
confidence: 99%
“…129,130 So far, sputtering has been the most reported PVD technique to deposit Nb 2 O 5 lms. Generally, Nb 2 O 5 lms can be obtained using direct current (DC) 72,[131][132][133][134][135][136] or radio frequency (RF) 18,132,[137][138][139][140][141][142][143] sputtering techniques with metallic niobium (Nb) 72,131,[133][134][135][138][139][140][141][142][144][145][146] or Nb 2 O 5 (ref. 18, 137 and 143) targets in the presence of carrier gases such as argon (Ar) in oxygen (O 2 ) environments.…”
Section: Physical Vapour Deposition (Pvd)mentioning
confidence: 99%
“…Based on their chemical and physical properties, these materials are suitable for a wide range of applications, such as catalysts in various types of reactions, semiconductor components in dye-sensitized solar cells, electronic components, photocatalysts for purification of water, air systems, and hydrogen production, among others. [6][7][8] It is interesting to highlight that nanostructured material is advantageous because some properties can only be achieved for nanoscale materials. Also, these properties can be changed by varying the morphology and size of the particles.…”
Section: Introductionmentioning
confidence: 99%
“…Com isso, outros semicondutores vêm sendo estudados, com propriedades adequadas para fotocatálise. Entre estes, o óxido de nióbio (Nb 2 O 5 ) vem se destacando, pois apresenta um band gap de 3,1 a 3,5 eV, boa estabilidade térmica e química e boas características fotocatalíticas, sendo uma alternativa na separação da água, podendo ser utilizado para promover o efeito de fotocatálise ou como suporte de metais e óxidos (BERGER, 2012;SREETHAWONG, 2012).…”
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