2022
DOI: 10.1039/d2py00234e
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Thermo-curable and photo-patternable polysiloxanes and polycarbosiloxanes by a facile Piers–Rubinsztajn polycondensation and post-modification

Abstract: With the rapid development of integrated circuit (IC) chips towards nanometric miniaturization, advanced integration and high performance, the interlayer dielectric (ILD) material is playing an increasingly important role to meet...

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Cited by 20 publications
(16 citation statements)
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“…As exhibited in Figure a, E-BCB , E-Si-BCB , and an equimolar mixture of E-Si-BCB and HEP display wide exothermic peaks, which have a similar onset curing temperature ( T onset ) of nearly 180 °C and the maximum exothermic peak temperature ( T peak ) of nearly 250 °C at first scan. These data are consistent with those of most reported BCB monomers. It is noted that no obvious exothermic peak is observed at the second scan of DSC (Figure a), indicating that all monomers have completely transformed into P1–P3 . FT-IR spectroscopy was employed to further investigate the thermal crosslinking reaction of monomers, and the results are displayed in Figure S3.…”
Section: Resultssupporting
confidence: 90%
“…As exhibited in Figure a, E-BCB , E-Si-BCB , and an equimolar mixture of E-Si-BCB and HEP display wide exothermic peaks, which have a similar onset curing temperature ( T onset ) of nearly 180 °C and the maximum exothermic peak temperature ( T peak ) of nearly 250 °C at first scan. These data are consistent with those of most reported BCB monomers. It is noted that no obvious exothermic peak is observed at the second scan of DSC (Figure a), indicating that all monomers have completely transformed into P1–P3 . FT-IR spectroscopy was employed to further investigate the thermal crosslinking reaction of monomers, and the results are displayed in Figure S3.…”
Section: Resultssupporting
confidence: 90%
“…The crosslinking reactions of BCB, as well as the rigid molecular structures, contributed to the high heat resistance. The T g , T d,5% and char yields of the cured resins from amorphous precursors were comparable to those of BCB-functionalized resins 27,49 and guaranteed their high working temperatures as high-performance polymers.…”
Section: Investigation On the Thermal And Mechanical Properties Of Th...mentioning
confidence: 66%
“…Unfortunately, all the T m of crystalline precursors exceeded 200 1C, which is commonly considered as the starting temperature of BCB ring-opening reaction, 27,49 indicating immediate BCB reactions after the crystals melting. Hence, the molten small molecules were unstable and tend to self-crosslink quickly, especially for those who possess T m above 220 1C.…”
Section: Evaluation Of the Crystallinity And Thermal Properties Of Bi...mentioning
confidence: 99%
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“…27 To increase the thermal stability of the porous structurebased low-dielectric-constant materials, diverse polymers with excellent thermal properties have been employed. [28][29][30][31] Among them, PIs were usually known as the "problem solver" due to their low dielectric constant, excellent thermal resistance, and mechanical properties induced by their conjugated and rigid backbones that contain a large number of nitrogen heterocycles and benzene rings, along with the strong intermolecular and intramolecular interactions. [32][33][34][35][36] For example, a PI aerogel was prepared by imidizing biphenyl-tetracarboxylic acid dianhydride, and 4,4 0 -oxydianiline.…”
Section: Introductionmentioning
confidence: 99%