Thermochemical Vapor Deposition of Diamond in a Carbon-Halogen-Oxygen and/or Sulfur Atmospheric Hot Wall Reactor

Patterson, Donald E.; Chu, Chiheng; Bai, Benjamin J.; Komplin, Norma J.; Hauge, Robert H.; Margrave, John L.

doi:10.1016/b978-0-444-89162-4.50093-2

Cited by 3 publications

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“…One such case is the thermally activated growth of diamond using halocarbons, highly diluted in molecular hydrogen [45,461. Indeed in recent work it has been reported that diamond can be grown without hydrogen present in any form [46]. The incorporation process in these experiments is obviously dependent on hydrogen, hydrogen fluoride or fluorine elimination reactions at the diamond surface which are not likely controlled by radical species.…”

Section: )mentioning

confidence: 91%

Thermochemical and Kinetic Considerations in Diamond Growth

Yarbrough¹

1992

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Section: )mentioning

confidence: 91%

Thermochemical and Kinetic Considerations in Diamond Growth

Yarbrough¹

1992

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The CVD of the Allotropes of Carbon

Pierson

1999

Handbook of Chemical Vapor Deposition (CVD)

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Vapor‐Phase‐Deposited Diamond—Problems and Potential

Yarbrough

1992

Journal of the American Ceramic Society

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Considerable progress has been made toward the goal of diamond synthesis by chemical vapor deposition (CVD). This progress consists of improved methods for synthesis and understanding how diamond is formed. The field has rapidly expanded with industrial consortia, international joint ventures, specialized journals, novel methods for synthesis and processing, and the introduction of new products. Despite this expansion, many issues remain unresolved, generating considerable debate within the research community. Among these debates is the question of how diamond is formed. Both thermodynamics and kinetics are frequently debated at the many world‐wide meetings on this technology. The resolution of these issues awaits further progress and, with improved understanding, may have implications for the synthesis of other ceramic materials. The diamond research community includes not only ceramists and other materials scientists, but specialists in subjects that range from chemistry and chemical engineering to solid‐state physics and electrical engineering. Crystals are grown using methods that range from the use of high‐power plasmas and the combustion of acetylene in oxygen to the thermal decomposition of fluorocarbons and various hydrocarbons in the presence of fluorine. Although some evidence exists for diamond heteroepitaxy, the goal of large‐area heteroepitaxial diamond has proved elusive. Thick (> 100 μm), free‐standing, polycrystalline diamond layers are being grown, and their properties rival those of natural crystals. Methods have been developed for the cutting, polishing, and brazing of diamond, and products are being tested in the marketplace. Engineering of the diamond–substrate interface for acceptable adhesion and reliability has progressed, although much work remains to be done. The central issues for commercialization are less the question of whether diamond can be grown in sufficient amounts or with sufficiently attractive properties, but rather whether the fabrication methods can be made sufficiently cost‐effective for the markets envisioned.

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Thermochemical Vapor Deposition of Diamond in a Carbon-Halogen-Oxygen and/or Sulfur Atmospheric Hot Wall Reactor

Cited by 3 publications

References 5 publications

Thermochemical and Kinetic Considerations in Diamond Growth

Thermochemical and Kinetic Considerations in Diamond Growth

The CVD of the Allotropes of Carbon

Vapor‐Phase‐Deposited Diamond—Problems and Potential

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