-The standard enthalpies, entropies, and Gibbs free energies of separate stages of the multistep hydrolysis of MX 4 molecules (M = C, Si, Ge; X = H, F, Cl) in the gas phase at 298 K were calculated by the G3 high-precision quantum-chemical method of calculation of thermodynamic parameters. The trends in these parameters were analyzed for each group of molecules. The calculated thermodynamic parameters make it possible to estimate the theoretical limits for the contents of water and hydrolysis products in the above high-purity carbon, silicon, and germanium derivatives.