Thermodynamic Investigation of the Effect of Target Compositions and Conditions of Their Magnetron Sputtering on Phase Compositions of the Resulting Films

Malinovskaya, T. D.; Sachkov, V. I.; Сосновский, С. А.; Zhek, V. V.

doi:10.1007/s11182-018-1524-1

Russ Phys J

2018

DOI: 10.1007/s11182-018-1524-1

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Thermodynamic Investigation of the Effect of Target Compositions and Conditions of Their Magnetron Sputtering on Phase Compositions of the Resulting Films

T. D. Malinovskaya

V. I. Sachkov

С. А. Сосновский

et al.

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Thermodynamic Investigation of the Effect of Target Compositions and Conditions of Their Magnetron Sputtering on Phase Compositions of the Resulting Films

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