2019
DOI: 10.1016/j.jpcs.2019.04.014
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Thermodynamic of intrinsic defects in β-Ga2O3

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Cited by 15 publications
(6 citation statements)
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“…Oxygen vacancy is an important defect in Ga 2 O 3 films, and the oxygen vacancy concentration in turn determines the performance of the PDs [49][50][51][52]. We deconvolved O1s XPS spectra for the Ga 2 O 3 films into two separate peaks corresponding to the lattice oxygen (labeled as O I ) and oxygen vacancy (labeled as O II ), respectively.…”
Section: Resultsmentioning
confidence: 99%
“…Oxygen vacancy is an important defect in Ga 2 O 3 films, and the oxygen vacancy concentration in turn determines the performance of the PDs [49][50][51][52]. We deconvolved O1s XPS spectra for the Ga 2 O 3 films into two separate peaks corresponding to the lattice oxygen (labeled as O I ) and oxygen vacancy (labeled as O II ), respectively.…”
Section: Resultsmentioning
confidence: 99%
“…In previous studies, several interatomic potentials for b-Ga 2 O 3 have been developed. [30][31][32][33] Bush et al 30 proposed a set of Ga and O parameters through fitting the lattice properties of a series of binary metal oxides. Blanco et al 31 developed a potential for studying the energy and migration of point defects in b-Ga 2 O 3 .…”
Section: Interatomic Potential Modelmentioning
confidence: 99%
“…Blanco et al 31 developed a potential for studying the energy and migration of point defects in b-Ga 2 O 3 . And recently, a set of potential parameters for calculating the vibrational entropy of defective b-Ga 2 O 3 have been released by Wang et al 32 The shell model 34 is adopted in the above potentials, [30][31][32] having the advantage to determine the polarization properties of atoms. However, the requirement of a much smaller integration timestep for shell dynamics will cost a lot of computational power.…”
Section: Interatomic Potential Modelmentioning
confidence: 99%
“…The defects including oxygen vacancy and gallium vacancy etc. will be formed with the growth of Ga 2 O 3 , resulting in a low carrier concentration and n-type conductivity of natively grown Ga 2 O 3 . For power electronic devices based on Ga 2 O 3 , the high carrier concentration and carrier mobility are essential. Doping provides a promising way to enhance the conductivity of native Ga 2 O 3 .…”
Section: Introductionmentioning
confidence: 99%