Thermodynamic properties of iron silicides FeSi andα-FeSi2

Acker, Jörg; Bohmhammel, K.; Berg, G.J.K. van den; Miltenburg, J.C. van; Kloc, Ch.

doi:10.1006/jcht.1999.0550

Cited by 36 publications

(25 citation statements)

References 15 publications

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“…It is found that in Fig. 8(b), the present predictions for S and C P agree well with the experimental data [81,82], and that the Debye model predicts the same tendency for H and G with the experimental data [81,82], where the discrepancy comes from the DH of a-FeSi 2 at 298.15 K.…”

Section: Thermodynamic Properties At Finite Temperaturessupporting

confidence: 85%

“…The experimental data, which is only available for aFeSi 2 , is shown in Fig. 8(b) for comparison [81,82]. It is found that in Fig.…”

Section: Thermodynamic Properties At Finite Temperaturesmentioning

confidence: 95%

“…7(a), (b) and Fig. 8(a) show the predicted thermodynamic properties (G, S, H, and C p ) of Fe 3 Si, FeSi and b- Krentsis [84], Davydov [83], Barin [82] and Acker [81]. The reference states for G and H are the relative enthalpy dH at 298.15 K with respect to bcc-Fe and A4-Si.…”

Section: Thermodynamic Properties At Finite Temperaturesmentioning

confidence: 99%

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First-principles calculations of phonon and thermodynamic properties of Fe-Si compounds

et al. 2011

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Section: Thermodynamic Properties At Finite Temperaturessupporting

confidence: 85%

“…The experimental data, which is only available for aFeSi 2 , is shown in Fig. 8(b) for comparison [81,82]. It is found that in Fig.…”

Section: Thermodynamic Properties At Finite Temperaturesmentioning

confidence: 95%

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First-principles calculations of phonon and thermodynamic properties of Fe-Si compounds

et al. 2011

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“…The binary phase diagrams of these metals with Si exhibit certain similarities [59]. First, there is a stable silicon-rich silicide phase with composition MeSi 2 with large negative heat of formation at room temperature between −80 and −140 kJ/mol [68,69]. The heat of formation of Ni silicides is a little bit lower around −45 kJ/mol [70].…”

Section: Fe Ni Mo and W Surfactantsmentioning

confidence: 99%

The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition

et al. 2012

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We investigate the ripple pattern formation on Si surfaces at room temperature during normal incidence ion beam erosion under simultaneous deposition of different metallic co-deposited surfactant atoms. The co-deposition of small amounts of metallic atoms, in particular Fe and Mo, is known to have a tremendous impact on the evolution of nanoscale surface patterns on Si. In previous work on ion erosion of Si during co-deposition of Fe atoms, we proposed that chemical interactions between Fe and Si atoms of the steady-state mixed Fe x Si surface layer formed during ion beam erosion is a dominant driving force for self-organized pattern formation. In particular, we provided experimental evidence for the formation of amorphous iron disilicide. To confirm and generalize such chemical effects on the pattern formation, in particular the tendency for phase separation, we have now irradiated Si surfaces with normal incidence 5 keV Xe ions under simultaneous gracing incidence co-deposition of Fe, Ni, Cu, Mo, W, Pt, and Au surfactant atoms. The selected metals in the two groups (Fe, Ni, Cu) and (W, Pt, Au) are very similar regarding their collision cascade behavior, but strongly differ regarding their tendency to silicide formation. We find pronounced ripple pattern formation only for those co deposited metals (Fe, Mo, Ni, W, and Pt), which are prone to the formation of mono and disilicides. In contrast, for Cu and Au co-deposition the surface remains very flat, even after irradiation at high ion fluence. Because of the very different behavior of Cu compared to Fe, Ni and Au compared to W, Pt, phase separation toward amorphous metal silicide phases is seen as the relevant pro-

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“…Acker did a significant amount of work characterizing the behavior of metals in chlorosilane environments both as a way to synthesize metal silicides and catalyze the conversion of STC to TCS for polysilicon production. [16][17][18] Mui also studied the corrosion behavior of many structural high temperature metals in a chlorosilane environment simulated by a packed C667 bed reactor. 9 However, his work was largely application based and did not focus on the underlying mechanisms of chlorosilane corrosion.…”

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confidence: 99%

High-Temperature (550–700°C) Chlorosilane Interactions with Iron

Aller

Mason

Walls

et al. 2016

J. Electrochem. Soc.

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Chlorosilane species are commonly used at high temperatures in the manufacture and refinement of ultra-high purity silicon and silicon materials. The chlorosilane species are often highly corrosive in these processes, necessitating the use of expensive, corrosion resistant alloys for the construction of reactors, pipes, and vessels required to handle and produce them. In this study, iron, the primary alloying component of low cost metals, was exposed to a silicon tetrachloride-hydrogen vapor stream at industrially-relevant times (0-100 hours), temperatures (550-700 • C), and vapor stream compositions. Post exposure analyses including FE-SEM, EDS, XRD, and gravimetric analysis revealed formation and growth of stratified iron silicide surface layers, which vary as a function of time and temperature. The most common stratification after exposure was a thin FeSi layer on the surface followed by a thick stoichiometric Fe 3 Si layer, a silicon activity gradient in an iron lattice, and finally, unreacted iron. Speculated mechanisms to explain these observations were supported by thermodynamic equilibrium simulations of experimental conditions. This study furthers the understanding of metals in chlorosilane environments, which is critically important for manufacturing the high purity silicon required for silicon-based electronic and photovoltaic devices.

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Thermodynamic properties of iron silicides FeSi andα-FeSi2

Cited by 36 publications

References 15 publications

First-principles calculations of phonon and thermodynamic properties of Fe-Si compounds

First-principles calculations of phonon and thermodynamic properties of Fe-Si compounds

The role of phase separation for self-organized surface pattern formation by ion beam erosion and metal atom co-deposition

High-Temperature (550–700°C) Chlorosilane Interactions with Iron

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