2024
DOI: 10.1134/s0036024424010321
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Thermodynamic Study of (Hexafluoroacetylacetonato)(cyclooctadiene-1,5)copper As the Technological Basis for the Development of Chemical Vapor Deposition of Metal-Containing Film Heterostructures

K. V. Zherikova,
S. V. Trubin,
D. P. Pishchur
et al.
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