Thermodynamics characteristics of MEMS infrared thin film

Xu, Chunguang; Liú, Dan; Zhou, Lang; Shi, Qingfeng; Gao, Yanze; Wang, Xin; Li, Zhuo

doi:10.1364/oe.27.032779

Cited by 16 publications

(8 citation statements)

References 13 publications

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“…They are core devices in many applications such as infrared scene generation technology. Numerous researchers have contributed to the development of infrared emitters and achieved very large performance advances in terms of, for example, array scale, temperature contrast ratio, and time response 4 – 6 . Several typical methods have been utilized, including digital micromirror devices (DMDs), resistor arrays, light-emitting diodes (LEDs) and microelectromechanical system (MEMS) thin-film emitters 7 – 12 .…”

Section: Introductionmentioning

confidence: 99%

“…However, the fabrication of these devices is complicated, and the layout of read-in or read-out integrated circuits becomes difficult with increasing array scale 16 . MEMS thin film emitters are based on light-driven technology and do not require integrated circuits 4 . In recent years, great progress has been made in the properties of MEMS thin-film infrared emitters 17 – 20 .…”

Section: Introductionmentioning

confidence: 99%

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Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

Zhang

et al. 2021

Microsyst Nanoeng

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Large-pixel-array infrared emitters are attractive in the applications of infrared imaging and detection. However, the array scale has been restricted in traditional technologies. Here, we demonstrated a light-driven photothermal transduction approach for an ultralarge pixel array infrared emitter. A metal-black coating with nanoporous structures and a silicon (Si) layer with microgap structures were proposed to manage the thermal input and output issues. The effects of the nanoscale structures in the black coating and microscale structures in the Si layer were investigated. Remarkable thermal modulation could be obtained by adjusting the nanoscale and microscale structures. The measured stationary and transient results of the fabricated photothermal transducers agreed well with the simulated results. From the input view, due to its wide spectrum and high absorption, the black coating with nanoscale structures contributed to a 5.6-fold increase in the temperature difference compared to that without the black coating. From the output view, the microgap structures in the Si layer eliminated the in-plane thermal crosstalk. The temperature difference was increased by 340% by modulating the out-of-plane microstructures. The proposed photothermal transducer had a rising time of 0.95 ms and a falling time of 0.53 ms, ensuring a fast time response. This method is compatible with low-cost and mass manufacturing and has promising potential to achieve ultralarge-array pixels beyond ten million.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

Zhang

et al. 2021

Microsyst Nanoeng

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“…These sparse and porous nanostructures can efficiently capture photons, and thus exhibit excellent optical properties [ 1 , 2 , 3 ]. Hence, optical absorbers based on nanoaggregate structures are widely used in microbolometers [ 4 ], photothermal converters [ 5 , 6 ], solar cells [ 7 , 8 ], and photocatalysis [ 9 ]. In addition, nanoaggregate structures show several desirable physical properties, such as low heat capacity, high specific surface area, and low density.…”

Section: Introductionmentioning

confidence: 99%

Structure of Randomly Distributed Nanochain Aggregates on Silicon Substrates: Modeling and Optical Absorption Characteristics

et al. 2022

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Nanoparticle aggregate structures allow for efficient photon capture, and thus exhibit excellent optical absorption properties. In this study, a model of randomly distributed nanochain aggregates on silicon substrates is developed and analyzed. The Gaussian, uniform, and Cauchy spatial distribution functions are used to characterize the aggregate forms of the nanochains and their morphologies are realistically reconstructed. The relationships between the structural parameters (thickness and filling factor), equivalent physical parameters (density, heat capacity, and thermal conductivity), and visible absorptivity of the structures are established and analyzed. All the above-mentioned parameters exhibit extreme values, which maximize the visible-range absorption; these values are determined by the material properties and nanochain aggregate structure. Finally, Al nanochain aggregate samples are fabricated on Si substrates by reducing the kinetic energy of the metal vapor during deposition. The spectral reflection characteristics of the samples are studied experimentally. The Spearman correlation coefficients for the calculated spectral absorption curves and those measured experimentally are higher than 0.82, thus confirming that the model is accurate. The relative errors between the calculated visible-range absorptivities and the measured data are less than 0.3%, further confirming the accuracy of the model.

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“…Direct radiation infrared image generation technology can directly produce infrared radiation through the electro-optical conversion (such as light emitting diode [12], laser diode array [13], etc. ), electro-thermal-optical conversion (such as resistor array [14][15][16]), and optical-thermal-optical conversion (such as MEMS infrared thin film transducer [17][18][19]). Modulated radiation infrared image generation technology (such as Digital Micromirror Devices, DMD [20,21]; IR liquid crystal light valve [22], MEMS optical attenuator [23], etc.)…”

Section: Introductionmentioning

confidence: 99%

“…Without requirement of read-in integrated circuits, the MEMS infrared thin film transducer can achieve larger scale pixels. It has been fabricated into 1313 × 1313 pixels and covers the wavelength range of 3~12 µm [17][18][19]. However, because this transducer is a soft composite film suspended on a large solid ring and its thickness is only several micrometers, it suffers from poor mechanical stability.…”

Section: Introductionmentioning

confidence: 99%

A Robust Infrared Transducer of an Ultra-Large-Scale Array

Zhang

Shi

et al. 2020

Sensors

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A robust micro-electro-mechanical systems (MEMS) infrared thin film transducer of an ultra-large-scale array was proposed and fabricated on a 4-inch silicon wafer. The silicon substrate and micro cavities were introduced. This novel transducer had excellent mechanical stability, time response, and state-of-the-art pixel scale. It could bear a load of 1700 g and its load pressure was improved by more than 5.24 times and time constant decreased by 50.7% compared to the traditional soft infrared thin film transducer. The array scale of its pixels exceeded 2k × 2k. The simulation and measured results of the transient temperature and radiation intensity were well consistent. Illuminated by a 532 nm laser with a frequency of 50 Hz and 50% duty cycle, the thermal decay time of the proposed transducer was 6.0 ms. A knife-edge image was utilized for spatial resolution test and the full width at half maximum (FWHM) of the proposed transducer was 24% smaller than the traditional soft one. High-resolution infrared images were generated using the proposed robust transducer. These results proved that the robust transducer was promising in infrared image generation.

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Thermodynamics characteristics of MEMS infrared thin film

Cited by 16 publications

References 13 publications

Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

Demonstration of thermal modulation using nanoscale and microscale structures for ultralarge pixel array photothermal transducers

Structure of Randomly Distributed Nanochain Aggregates on Silicon Substrates: Modeling and Optical Absorption Characteristics

A Robust Infrared Transducer of an Ultra-Large-Scale Array

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