2013
DOI: 10.1039/c3ta12909h
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Thermoelectric characteristics of (Zn,Al)O/hydroquinone superlattices

Abstract: Thin ZnO layers doped with aluminum and interspersed with regularly repeating single layers of organic molecules are deposited by a combined atomic layer deposition (ALD) and molecular layer deposition (MLD) method at 220 C using diethyl zinc, trimethyl aluminum, water and hydroquinone (HQ) as precursors. Hydroquinone is found to form distinct layers within the (Zn,Al)O framework such that clear inorganic-organic superlattice structures are realized. Aluminum doping efficiently offsets the decrease in carrier … Show more

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Cited by 74 publications
(88 citation statements)
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“…12,13 Most interestingly, use of metal precursors together with organic precursors enables hybrid inorganic-organic thin films to be fabricated with combined ALD/MLD processes, 14,15 where the organic precursors can be, e.g., organic alcohols 14,16 or carboxylic acids. 17,18 Such combined ALD/MLD processes also allow for fabrication of hybrid inorganic-organic materials in the form of nanolaminates [19][20][21] and superlattices [22][23][24] in an elegant manner.…”
Section: Introductionmentioning
confidence: 99%
“…12,13 Most interestingly, use of metal precursors together with organic precursors enables hybrid inorganic-organic thin films to be fabricated with combined ALD/MLD processes, 14,15 where the organic precursors can be, e.g., organic alcohols 14,16 or carboxylic acids. 17,18 Such combined ALD/MLD processes also allow for fabrication of hybrid inorganic-organic materials in the form of nanolaminates [19][20][21] and superlattices [22][23][24] in an elegant manner.…”
Section: Introductionmentioning
confidence: 99%
“…However, care should be taken when drawing conclusions on this point, because while the TDTR technique measures the cross-plane thermal conductivity of the thin films, our existing power factor measurements were made in-plane. 14 Thus, the values may not be comparable, especially in a highly anisotropic structure such as the current layered (Zn,Al)O:HQ thin films. Nonetheless, the observed thermal conductivity values represent a significant reduction and should prove effective in improving the thermoelectric performance of ZnO thin films.…”
mentioning
confidence: 99%
“…As an example of a novel class of * phopkins@virginia.edu nanocomposites of recent interest, hybrid organic/inorganic nanomaterials grown by a combined alternation of atomic layer deposition (ALD) and molecular layer deposition (MLD) have exhibited enhanced electrical, optical, magnetic, and mechanical functionalities compared to conventional organic or inorganic materials [10][11][12][13]. For example, using this ALD/MLD technique, inorganic/organic superlattices (SLs) have shown promise as potential thermoelectric materials [14,15]. However, paramount in advancing ALD/MLD hybrid structures for use in thermoelectric, or other applications, is an understanding of the phonon transport and scattering processes in these materials; referring to ALD/MLD SLs, this requires understanding phonon scattering at the ALD/MLD boundary, and its correlation with phonon transmission and resulting boundary conductance across the molecular interface.…”
Section: Introductionmentioning
confidence: 99%