Keywords: p-Si/i-β-FeSi 2 /n-Si photodiode, responsivity, quantum efficiencyIn this study the responsivity and quantum efficiency of p-Si/i-β-FeSi 2 /n-Si doubleheterostructure photodiodes and p-Si/i-Si/n-Si photodiodes are investigated by self-developed analytical methods. The dark current densities of both β-FeSi 2 and Si p-i-n photodiodes under the reverse bias condition are calculated by solving the diffusion current densities of minority carriers. The photocurrent densities of both p-i-n photodiodes under illumination with reverse bias are mainly calculated by solving the drift current densities in the depletion regions. When the β-FeSi 2 p-i-n photodiode incident wavelength, λ, is less than 0.6 µm, the magnitudes of responsivity and quantum efficiency are almost zero for different intrinsic thicknesses. The maximum responsivity, R = 0.65 A/W, and quantum efficiency, η = 65%, are both at λ = 1.2 µm and the intrinsic β-FeSi 2 layer thickness is 100 µm. The calculated responsivity of the Si p-i-n photodiode is consistent with the reported studies. Therefore, the analysis methods and results are valid in this work. These results indicate the high applicability of β-FeSi 2 to near-infrared photodiodes integrated with Si. Therefore, the p-Si/i-β-FeSi 2 /n-Si photodiode is a new highefficiency light sensor device applicable to optical fiber communications.