2012
DOI: 10.1016/j.tsf.2012.07.046
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Thermoelectric properties of nanostructured Al-substituted ZnO thin films

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Cited by 50 publications
(37 citation statements)
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“…ZnO:Al thin films were grown by RF magnetron sputtering on single crystalline Al 2 O 3 (110) substrates using a 2 wt% Al 2 O 3 and 98 wt% ZnO ceramic target (99.995% pure, Williams Advanced Materials) 2, 15. A gas mixture of Ar and 0.04% O 2 with a total pressure of 0.1 Pa was applied to generate the plasma.…”
Section: Methodsmentioning
confidence: 99%
“…ZnO:Al thin films were grown by RF magnetron sputtering on single crystalline Al 2 O 3 (110) substrates using a 2 wt% Al 2 O 3 and 98 wt% ZnO ceramic target (99.995% pure, Williams Advanced Materials) 2, 15. A gas mixture of Ar and 0.04% O 2 with a total pressure of 0.1 Pa was applied to generate the plasma.…”
Section: Methodsmentioning
confidence: 99%
“…1(a). This is because the stacking and combination of Zn and O atoms create irregular and lowenergy crystals during the film formation (Vogel-Schä uble et al, 2012). A large amount of Zn atoms on the substrate leads to Zn interstitials, which act as donor defects.…”
Section: Growth Modes Of the Zno:al Filmsmentioning
confidence: 99%
“…Optimization of the annealing technique not only enhanced the orientation of ZnO:Al films but prohibited the formation of nanocrystalline zones. The annealing process removes the donor defects such as oxygen vacancies to reduce the carrier concentration and increase the Seebeck coefficient to 500 mV K À1 (Vogel-Schä uble et al, 2012;Zhou et al, 2011). Inserting a buffer layer in the TE films obviated the lattice mismatch between the substrate and ZnO:Al films.…”
Section: Introductionmentioning
confidence: 99%
“…While thermoelectric materials are often proposed to improve the energy efficiency by the direct conversion of waste heat into electricity, they may also be used to create passive or self‐powered sensor systems in which thermal input may be utilized. Recent studies on the thermoelectric properties of transparent conductive materials are giving rise to a novel field of transparent thermoelectrics allowing new applications within display technologies.…”
Section: Introductionmentioning
confidence: 99%