Thermomechanical Lithography: Pattern Replication Using a Temperature Gradient Driven Instability

Schäffer, Erik; Harkema, Stephan; Roerdink, Monique; Blossey, Ralf; Steiner, Ullrich

doi:10.1002/adma.200390119

Cited by 86 publications

(90 citation statements)

References 24 publications

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“…This leads to the growth of surface capillary waves engendered by thermal fluctuations [14,44,106,107]. As instabilities propagate through film surface, structures with spatial correlation are generated to minimize system energy.…”

Section: Manipulation Of Fluidic Thin Filmsmentioning

confidence: 99%

Micro and Nano Manipulation and Assembly by Optically Induced Electrokinetics

Lai

et al. 2015

Micro‐ and Nanomanipulation Tools

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IntroductionIn the past 25 years, integrated circuit (IC) and microelectromechanical systems (MEMSs) technologies have moved much beyond the microdomain, and into the submicro-, nanoscopic, and, even, the molecular scales. Today, we have the capability to fabricate, manipulate, and assemble matters at the micro-, nano-, or molecular scales. This progress into "seeing" and manipulating matters that are smaller than visible light wavelength scale is impacting a range of fields including semiconductor physics, biological studies, pharmaceutical development, and many other scientific and technological applications. A range of new methods to generate physical forces have been developed in the process. For example, mechanical forces can now be applied to micro-, nano-, and biological entities using atomic force microscope probes [1], microgrippers [2], or pipettes [3]. However, disadvantages of these approaches, including inflection of mechanical damages on objects being manipulated and their relatively low manipulation speed, make manipulation of large quantities of objects difficult. In order to address these disadvantages, noncontact or noninvasive methods for micro-, nano-, and biological manipulation have also been explored in the past two decades.Manipulation devices based on magnetic forces [4], acoustic waves [5,6], hydrodynamic flows [7], light waves [8], or electrokinetic forces [9] are among the major noninvasive technologies available today. Each of them has its own advantages and disadvantages. Methods based on magnetic fields need premodification on objects with magnetic beads which constrains their application domain. In addition, movement controlled by permanent magnets is not precise enough for many proposed applications. Also, the high resistance of the magnetic coil generates significant heat during manipulation [10]. Acoustic traps show good selectivity but cannot achieve parallel manipulation of single entities. Microfluidic devices exploiting hydrodynamic flows are suitable for cell population sorting, but have difficulties in trapping or controlling specific single objects.Electrokinetic forces generated from patterned electrodes capable of inducing the desired spatial distribution of electric field have been exploited to control

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Section: Manipulation Of Fluidic Thin Filmsmentioning

confidence: 99%

Micro and Nano Manipulation and Assembly by Optically Induced Electrokinetics

Lai

et al. 2015

Micro‐ and Nanomanipulation Tools

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“…While the original experiments [10][11][12][13] were designed to probe values of D Շ 5, the experiments reported in Ref. 16 and reanalyzed in this work allowed access to a larger range D Շ 25.…”

Section: Linear Stability Predictions For the Wavelength Of The Fmentioning

confidence: 99%

“…In all experiments to date reported in the literate, the separation distance d o was far too small to accommodate even the smallest of thermocouples, so no direct measurement of DT could be made. Descriptions of previous experiments [8][9][10][11][12][13] suggest that the values of DT were incorrectly assumed to be the difference in temperature between the set points of the hot and cold stages contacting the two substrates. Such estimates, however, tend to overestimate DT.…”

Section: Estimates Of Dt From Improved Finite Element Modelmentioning

confidence: 99%

“…8,9 Subsequent theoretical and experimental work suggested that the instability might instead be due to an acoustic phonon (AP) mechanism leading to periodic modulation of the acoustic pressure within the film. [10][11][12][13] More recent theoretical and experimental work by our group has indicated that the instability represents a new limit of the long wavelength Benard-Marangoni instability, distinguished by extremely large thermocapillary forces and negligible a) Author to whom correspondence should be addressed. Electronic mail: stroian@caltech.edu.…”

Section: A Controversy Over the Instability Mechanism In Molten Nanomentioning

confidence: 99%

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Early time instability in nanofilms exposed to a large transverse thermal gradient: Improved image and thermal analysis

Fiedler

Troian

2016

Journal of Applied Physics

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“…Polymer films are likely prepared by spin-coating or dip-coating and classified as ultrathin films with a thickness < 100 nm or thin films with a thickness of 100 to 10,000 nm [1]. Due to the (visco-)elasticity of polymer films, the morphology can be influenced by interactions with the substrate or by external effects such as, e.g., temperature [2], humidity [3], pressure [4], electricity [5], light [6] or direct convection [7]. The adaptable morphology and response to external stimuli provides an excellent way for in situ handling of the morphology and properties of the polymer film.…”

Section: Introductionmentioning

confidence: 99%

Morphologies and Thermal Variability of Patterned Polymer Films with Poly(styrene-co-maleic anhydride)

Samyn

Schoukens

2014

Polymers

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Patterned films of poly(styrene-co-maleic anhydride) copolymers were deposited by dip-coating from acetone solutions. A qualitative study of the film morphologies shows the formation of polymer spheres with smaller diameters at higher amounts of maleic anhydride (MA), and long-fibrous features at higher molecular weights. Upon heating, the films progressively re-assemble with short-and long-fibrous structures as a function of heating time and temperature. In parallel, the film morphologies are quantified by image processing and filtering techniques. The differential scanning calorimetry confirms the higher glass transition temperatures with increasing amount of MA. The analysis with Raman spectroscopy shows interactions between the molecules in solution and effects of ring-opening (hydrolysis) and ring-closure (formation of MA) during drying of the films. The water contact angles on the patterned films are within the hydrophilic range. They mainly correlate with the amount of MA moieties calculated from spectroscopy, while the roughness parameters have a minor effect. The variations in film patterns illustrate the self-assemble ability of the copolymers and confirm a heterogeneous molecular structure, as previously assumed.

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Thermomechanical Lithography: Pattern Replication Using a Temperature Gradient Driven Instability

Cited by 86 publications

References 24 publications

Micro and Nano Manipulation and Assembly by Optically Induced Electrokinetics

Micro and Nano Manipulation and Assembly by Optically Induced Electrokinetics

Early time instability in nanofilms exposed to a large transverse thermal gradient: Improved image and thermal analysis

Morphologies and Thermal Variability of Patterned Polymer Films with Poly(styrene-co-maleic anhydride)

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