2005
DOI: 10.1063/1.1850632
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Thermoreflectance based thermal microscope

Abstract: Thermal images of active semiconductor devices are acquired and processed in real time using visible light thermoreflectance imaging with 34mK sensitivity. By using a 16×16 alternating current coupled photodiode array with synchronous frequency domain filtering a dynamic range of 123dB is achieved for 1s averaging. Thus with a stable and higher power light source, fundamentally the camera can reach 6mK sensitivity over a submicron area. The number of pixels in the image is increased to 160×160 by multiple fram… Show more

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Cited by 112 publications
(67 citation statements)
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“…This additional photo-induced current can cause a significant additional device heating, which often dominates even the direct laser heating induced temperature rise [22]. Reflectivity changes can also be used to optically probe the device temperature, either considering only the change in reflectivity [23,24], or additionally by measuring the phase shift of the reflected light [25,26]. Calibration of the thermoreflectance coefficient can be challenging as the change in reflectivity with temperature is often small, however it is possible by performing careful measurements of specially prepared samples [27].…”
Section: Techniquesmentioning
confidence: 99%
“…This additional photo-induced current can cause a significant additional device heating, which often dominates even the direct laser heating induced temperature rise [22]. Reflectivity changes can also be used to optically probe the device temperature, either considering only the change in reflectivity [23,24], or additionally by measuring the phase shift of the reflected light [25,26]. Calibration of the thermoreflectance coefficient can be challenging as the change in reflectivity with temperature is often small, however it is possible by performing careful measurements of specially prepared samples [27].…”
Section: Techniquesmentioning
confidence: 99%
“…However, the thermometer sensitivity is not reported and no data are published to estimate it. These NPs are one of the few examples reported so far of cellular thermometers based on Ln , Ln ¼ Er, Tm) were also used for high-contrast intracellular fluorescence images of HeLa cells 64,68,124 and in vivo whole body nude mouse.…”
mentioning
confidence: 99%
“…5 Based on this dependence, the distribution of the temperature change on a material surface can be quantitatively described as:…”
Section: Thermoreflectance Imaging Methodsmentioning
confidence: 99%