2005
DOI: 10.1063/1.2130333
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Thermoreflectance technique to measure thermal effusivity distribution with high spatial resolution

Abstract: We have developed an apparatus to measure thermal effusivity distribution in solid materials with a high spatial resolution better than 10μm by the thermoreflectance technique and the periodic heating method. A metal film sputtered on the surface of a sample is periodically heated by a modulated laser beam. The temperature response is measured by using another thin laser beam as a thermoreflectance signal. The thermal effusivity of the sample is derived from the phase lag of the temperature response from the p… Show more

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Cited by 75 publications
(57 citation statements)
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“…conductivities. This discrepancy between the values in the literature for regions with higher thermal conductivity is considered to be caused by the effect of a two -dimensional heat flow, which is not considered in the conventional one-dimensional model [12]. This assump -tion was also confirmed experimentally.…”
Section: Introductioncontrasting
confidence: 41%
“…conductivities. This discrepancy between the values in the literature for regions with higher thermal conductivity is considered to be caused by the effect of a two -dimensional heat flow, which is not considered in the conventional one-dimensional model [12]. This assump -tion was also confirmed experimentally.…”
Section: Introductioncontrasting
confidence: 41%
“…The commercial available equipment was supplied by Bethel Co., Ltd., Ibaraki, Japan, and was named thermal microscope. 15) Figure 2 illustrates a schematic diagram of the thermal microscope. Semiconductor laser was used as a heating laser.…”
Section: Thermal Microscopementioning
confidence: 99%
“…Photothermal techniques include photothermal displacement, 7 photothermal beam deflection (or "mirage"), 8 photothermal radiometry (PTR), 9 and photothermal reflectance (or thermoreflectance). [10][11][12][13] Thermoreflectance techniques may be distinguished as one of the two measurement types: time-domain and frequencydomain measurements. In the frequency-domain thermoreflectance technique, a layered sample (an n-layer model is presented but the results are later presented for a single layer on a substrate) is heated by the absorption of a modulated (sinusoidal) heat source supplied by a pump laser.…”
Section: Introductionmentioning
confidence: 99%
“…With a computer-controlled, motorized stage, local thermal effusivity maps of a sample surface can be obtained. 11 To remove the complexity of lens alignments, fiber-aligned thermoreflectance is also under study. 14 Precise modeling of the heat transport process in the layered-sample system is significant because the reflected signal only has an implicit relationship with the thermal properties of the system.…”
Section: Introductionmentioning
confidence: 99%
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