Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications

Dinh, Toan; Phan, Hoang‐Phuong; Qamar, Afzaal; Woodfield, Peter; Nguyen, Nam‐Trung; Dao, Dzung Viet

doi:10.1109/jmems.2017.2710354

Cited by 128 publications

(93 citation statements)

References 180 publications

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“…For example, their temperature coefficient of Applied Physics Reviews REVIEW scitation.org/journal/are resistance values typically is lower than 1250 ppm/K compared to several thousands to several tens of thousands of ppm/K for metals or bulk semiconductors. 174 To improve the thermosensitivity of these materials, they have been mixed with other materials to form a hybrid sensitive material. A soft temperature sensitive nanocomposite was fabricated by doping mechanically adaptable polymers based on hydrogen bonds with SWNTs [ Fig.…”

Section: B Temperature Sensorsmentioning

confidence: 99%

Stretchable sensors for environmental monitoring

Yang

Deng

2019

Applied Physics Reviews

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The development of flexible and stretchable sensors has been receiving increasing attention in recent years. In particular, stretchable, skin-like, wearable sensors are desirable for a variety of potential applications such as personalized health monitoring, human-machine interfaces, and environmental sensing. In this paper, we review recent advancements in the development of mechanically flexible and stretchable sensors and systems that can be used to quantitatively assess environmental parameters including light, temperature, humidity, gas, and pH. We discuss innovations in the device structure, material selection, and fabrication methods which explain the stretchability characteristics of these environmental sensors and provide a detailed and comparative study of their sensing mechanisms, sensor characteristics, mechanical performance, and limitations. Finally, we provide a summary of current challenges and an outlook on opportunities for possible future research directions for this emerging field.

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Section: B Temperature Sensorsmentioning

confidence: 99%

Stretchable sensors for environmental monitoring

Yang

Deng

2019

Applied Physics Reviews

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“…Micro electromechanical system (MEMS) gyroscope has the advantages of small size, light weight, and low cost [1,2,3,4], which is widely used in various fields of modern navigation. However, the accuracy of MEMS gyroscopes is low.…”

Section: Introductionmentioning

confidence: 99%

Random Error Analysis of MEMS Gyroscope Based on an Improved DAVAR Algorithm

et al. 2018

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In view that traditional dynamic Allan variance (DAVAR) method is difficult to make a good balance between dynamic tracking capabilities and the confidence of the estimation. And the reason is the use of a rectangular window with the fixed window length to intercept the original signal. So an improved dynamic Allan variance method was proposed. Compared with the traditional Allan variance method, this method can adjust the window length of the rectangular window adaptively. The data in the beginning and terminal interval was extended with the inverted mirror extension method to improve the utilization rate of the interval data. And the sliding kurtosis contribution coefficient and kurtosis were introduced to adjust the length of the rectangular window by sensing the content of shock signal in terminal interval. The method analyzed the window length change factor in different stable conditions and adjusted the rectangular window’s window length according to the kurtosis, sliding kurtosis contribution coefficient. The test results show that the more the kurtosis stability threshold was close to 3, the stronger the dynamic tracking ability of DAVAR would be. But the kurtosis stability threshold was too close to 3, there was a misjudgement in kurtosis analysis of signal stability, resulting in distortion of DAVAR analysis results. When using the improved DAVAR method, the kurtosis stability threshold can be close to 3 to improve the tracking ability and the estimation confidence in stable interval. Therefore, it solved the problem that the dynamic Allan variance tracking ability and confidence level were difficult to take into account, and also solved the problem of misjudgement in the stability analysis of kurtosis.

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“…The demand for electronics and sensors which can operate in extreme conditions has propelled the research into wide band gap materials such as III‐nitride (e.g., GaN, AlN), silicon carbide (SiC) and diamond‐like carbon (DLC) . Among these materials, SiC has emerged as an excellent semiconductor for Micro Electro Mechanical Systems (MEMS) applications owing to its large energy gap, varying from 2.3 to 3.4 eV, excellent chemical inertness, superior mechanical properties, and outstanding radiation tolerance . Numerous SiC technologies have been transitioned into commercial products, including bipolar transistors, Schottky diodes, field effect transistors, ultraviolet photodetectors, and gas sensors …”

Section: Introductionmentioning

confidence: 99%

Strain Effect in Highly‐Doped n‐Type 3C‐SiC‐on‐Glass Substrate for Mechanical Sensors and Mobility Enhancement

Phan

Nguyen

Dinh

et al. 2018

Physica Status Solidi (a)

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This work reports the strain effect on the electrical properties of highly doped n‐type single crystalline cubic silicon carbide (3C‐SiC) transferred onto a 6‐inch glass substrate employing an anodic bonding technique. The experimental data shows high gauge factors of −8.6 in longitudinal direction and 10.5 in transverse direction along the [100] orientation. The piezoresistive effect in the highly doped 3C‐SiC film also exhibits an excellent linearity and consistent reproducibility after several bending cycles. The experimental result is in good agreement with the theoretical analysis based on the phenomenon of electron transfer between many valleys in the conduction band of n‐type 3C‐SiC. Our finding for the large gauge factor in n‐type 3C‐SiC coupled with the elimination of the current leak to the insulated substrate could pave the way for the development of single crystal SiC‐on‐glass based MEMS applications.

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Thermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications

Cited by 128 publications

References 180 publications

Stretchable sensors for environmental monitoring

Stretchable sensors for environmental monitoring

Random Error Analysis of MEMS Gyroscope Based on an Improved DAVAR Algorithm

Strain Effect in Highly‐Doped n‐Type 3C‐SiC‐on‐Glass Substrate for Mechanical Sensors and Mobility Enhancement

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