Thickness and Refractive Index Measurement System for Multilayered Samples

Abstract

In order to simultaneously obtain the thickness and refractive index for each layer of multilayered samples, this paper proposes a novel measurement system with a simple structure by using geometric optics. The key point of the overall structure is that the binary linear equation relation between the upper and lower planes of the layer can be known by the distances between laser spots reflected from the layer. Using two optical paths with different incident angles of laser beams, the CCD sensors capture the spot signal for image processing binarization and data sampling. After the obtained laser spots' spacing is substituted into the equations, the thicknesses and refractive indexes of the multilayered samples can be calculated and measured. The proposed measurement system is characterized numerically using simulations on the commercial software program Zemax and then experimentally tested using a laboratory-built prototype. The experiment results show that the refractive indexes and the thicknesses of three-layer samples were measured with high accuracy (with maximum measurement errors of 2.4% and 2% for a refractive index n and thickness d, respectively).INDEX TERMS Auto-focusing microscopy, multilayered samples, optical system, refractive index, Thickness.

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“…Kim et al [10] achieved simultaneous measurement of thickness and refractive index using a bidirectional white light interferometer. Liu et al [11] proposed a measurement system capable of simultaneously obtaining the thickness and refractive index for each layer of multilayered samples. Wang et al [12] proposed a method that combines confocal systems with ray tracing iterative calculation.…”

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