2018
DOI: 10.1063/1.5025685
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Thickness dependence of crystal and optical characterization on ZnO thin film grown by atomic layer deposition

Abstract: We studied the thickness dependence of the crystallographic and optical properties of ZnO thin films grown on c-plane sapphire substrate using atomic layer deposition. High-resolution X-ray diffraction (HR-XRD) revealed two peaks at 34.5° and 36.2° in the initial growth stage of ZnO on the sapphire substrate, corresponding to the (002) and (101) ZnO planes, respectively. However, as the thickness of the ZnO film increased, the XRD intensity of the (002) ZnO peak increased drastically, compared with that of the… Show more

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Cited by 18 publications
(6 citation statements)
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“…47,51 Secondly, narrowing of the E g could be ascribed to increasing film density because volume effect decreased with additional Ga atoms supplied and oxidized on the surface (Figs. 3 and 4), as supported by other literature reports on ZnO material, 52,53 and consistent with our previous report. 35 The density of charges increases with substrate coverage, and then every electron is effectively surrounded by an exchange correlating hole that lowers the energy level of the electron and the conduction band is shifted downwards, thereby narrowing the E .…”
Section: Uv-vissupporting
confidence: 93%
“…47,51 Secondly, narrowing of the E g could be ascribed to increasing film density because volume effect decreased with additional Ga atoms supplied and oxidized on the surface (Figs. 3 and 4), as supported by other literature reports on ZnO material, 52,53 and consistent with our previous report. 35 The density of charges increases with substrate coverage, and then every electron is effectively surrounded by an exchange correlating hole that lowers the energy level of the electron and the conduction band is shifted downwards, thereby narrowing the E .…”
Section: Uv-vissupporting
confidence: 93%
“…The cross section of (αhυ) 2 versus the photon energy, as shown in Figure 5c, gives the E g values listed in Table 1 for all four ZnO/Al 2 O 3 composites. The average E g of the ZnO in all ZnO/Al 2 O 3 photocatalysts was found to be about 3.25 eV, which is lower than the value for bulk ZnO (3.3 eV), but in agreement with literature data for ultrathin ALD ZnO layers [18].…”
Section: Characterization Of Zno/al2o3supporting
confidence: 88%
“…Lastly, a variation from 160 to 200 nm introduced a small increase of 0.33 mA/cm 2 . On the other hand, as the thickness of ZnO changed from 14.2 to 62.7 nm, the band gap energy increased from 3.22 to 3.26 eV [45]. It is known that in semiconductors with band gaps greater than 1.56 eV, the absorption coefficient and the transmission coefficient should decrease as the band gap energy decreases.…”
Section: Impact Of Emitter Layer Thickness On Short Circuit Currentmentioning
confidence: 99%