Thin films of the BaTiO 3 Bi(Mg 1/2 Ti 1/2 )O 3 (BTBMT) solid-solution system with preferential crystal orientation of (100) and (111) plane were fabricated on (100)SrRuO 3 //(100)SrTiO 3 and (111)SrRuO 3 //(111)SrTiO 3 substrates by CSD technique. Enhanced dielectric permittivity (¾ r ) of approximately 800 was confirmed for the (111)-oriented BTBMT film at room temperature, which is significantly larger than those of (100)-or randomly-oriented films. The BTBMT films exhibited relatively stable temperature coefficient of capacitance (TCC) independent of their crystal orientation, that allows enhanced ¾ r up to 400°C without drastic change of the capacitance. These properties can be favorable for the application of dielectric capacitors in hightemperature electronics.