2001
DOI: 10.1021/la001125k
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Thickness Dependence of the Glass Transition Temperature in Thin Polymer Films

Abstract: In this paper the glass transition temperature (T g) in thin polymer films has been studied. Ellipsometry has been used to measure T g of poly(α-methylstyrene) (PAMS) thin films as a function of the film thickness for two molecular weights. When the films were thinner than a few hundred angstroms, substantial reduction in T g was apparent. The T g depression pattern did not show the difference between molecular weights. The Michaelis−Menten equation was adapted and used to fit the experimentally obtained T g d… Show more

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Cited by 180 publications
(233 citation statements)
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“…The change in Tg as a function of film thickness is well known in the polymer literature, [8][9][10][11] and has been modeled by Keddie et al (Eqn. 1).…”
Section: Experimental Approachmentioning
confidence: 99%
See 1 more Smart Citation
“…The change in Tg as a function of film thickness is well known in the polymer literature, [8][9][10][11] and has been modeled by Keddie et al (Eqn. 1).…”
Section: Experimental Approachmentioning
confidence: 99%
“…[28][29][30] Since Tg is known to be dependent on film thicknesses, [8][9][10][11] and Tg is closely related to acid diffusion, 31 LER degradation in thin films may be caused by an increased diffusion of acid. JSR donated two sets of resists for this study.…”
Section: Pag Attachmentmentioning
confidence: 99%
“…It has been recognized that several factors are intricately responsible for the departure of T g in ultrathin films, from the bulk value [27,44,45,[95][96][97][98][99]; e.g. the proximity of a free surface, substrate interactions, and process-induced anisotropy.…”
Section: Interfacial Glass Transition Profilesmentioning
confidence: 99%
“…The size dependent properties of ultrathin PS films are believed to come from the effect of configurational constraints at the surface and interface [9][10][11]. Disagreement in the explanation of size dependence still exists on whether there is a liquid like layer near the surface [12,13].…”
Section: Introductionmentioning
confidence: 99%