The structure of high quality ͓YBCO N ͞PBCO M ͔ 1000 ± A superlattices, with N ranging between 1 and 12 unit cells and M 5 unit cells, grown by high oxygen pressure sputtering, is analyzed. Intracell atomic structure of the layers along the c axis and disorder at interfaces is investigated using an x-ray refinement technique. Negligible roughness, step disorder, and interdiffusion are found at the interfaces. Epitaxial mismatch strain results in a surprising reorganization of interatomic distances for the thinnest YBCO layers, which seems to correlated with the decrease in the critical temperature. Intracell structure is invoked as an additional source of T c changes in very thin YBCO layers. PACS numbers: 74.76.Bz, 61.10.Nz, 68.65. + g Since the discovery of the high T c superconductivity, structure has been recognized to play a crucial role towards the understanding of its nature and mechanisms. It has been known for years that distortions arising from cation substitution can produce significant changes in T c [1], and recent experiments on doped La 2 CuO 4 superconductors at constant carrier concentration show a clear dependence of T c on lattice strains [2]. A great effort has been put in structure determination under hydrostatic pressure [3]. Epitaxial stress in thin films offers a simple way to arrive at a strain pattern not attainable under hydrostatic pressure [4]: According to the Poisson effect, film growth on a substrate with slightly smaller (larger) in-plane lattice parameters may lead to a compression (expansion) in the ab plane that can result in an expansion (contraction) in the out-ofplane direction. Uniaxial epitaxial strain, together with Poisson's ratios, has been addressed before [5]. However, the general applicability of the Poisson effect to thin films is still doubtful [6], especially in these highly anisotropic materials. Anyway, Locquet et al. [7] have been able to double the critical temperature in the La 1.9 Sr 0.1 CuO 4 high T c superconductor using mismatch strain. They show that compressive epitaxial strain in-plane can generate much larger increases in T c than those obtained by comparable hydrostatic pressures, and their claim is that the distance relevant to the mechanism of the superconductivity being modified is the separation between consecutive CuO 2 planes. Mismatch strain constitutes an alternative way to change the intracell distances which may be "relevant" to the mechanism of superconductivity, but a quantitative structure analysis of strained films is necessary. X-ray diffraction is a widely used technique to analyze structure, which supplies structural information averaged over a length scale (structural coherence length) which may be around a hundred angstroms. The extraction of quantitative information requires the fit of the diffraction pattern to a structure model containing a large number of parameters in these complex materials, and, therefore, results may not be very reliable for single epitaxial films, which usually show a reduced number of diffraction peak...