Thickness dependent physical and photocatalytic properties of ITO thin films prepared by reactive DC magnetron sputtering

Structural and morphological properties of ITO thin films grown by magnetron sputtering

“…Various techniques, such as electron beam evaporation [7], ion beam-assisted deposition [8], pulsed laser ablation [9,10], ion implantation [11] and RF/DC magnetron sputtering [12][13][14], are applied for deposition of ITO thin films. Besides the process parameters, the thickness also can affect the properties of the samples [15][16][17][18][19][20][21][22].…”

Optical analysis of room temperature magnetron sputtered ITO films by reflectometry and spectroscopic ellipsometry

“…27 Reflectometry gives the thickness and wavelength dependent refractive index and extinction coefficient of the thin film provided the base data on the refractive index of the substrate is fed to the program. Table 1.…”

“…With the advent of applications 6,[28][29][30][31][32][33] demanding the preparation (manufacture) of these ITO films at relatively low temperature or preferably at room temperature (300 K) (mainly for the touch panel displays on plastics and top electrode for solar cells and electrochromic devices on flexible plastic substrates), our laboratory has reported the physical properties (including photocatalytic properties) of ITO thin films (as a function of thickness) prepared at room temperature (300 K) by reactive DC magnetron sputtering technique. 27 The aim of the present communication is mainly (i) to report the optical constants of room temperature (300 K) magnetron sputtered ITO thin films and (ii) to compare the optical constants of these ITO thin films by spectral reflectometry (SR) (fast and cost effective) and spectroscopic ellipsometry (SE) (time consuming, demand expertise for analyses). Characteristic optical properties of thin film structures can be derived from spectroscopic SE measurement, which is known to be a high-precision optical characterization technique.…”

Improved structural and electrical properties of thin ZnO:Al films by dc filtered cathodic arc deposition

“…It is known that the electrical and optical properties of transparent conducting oxide (TCO) thin films, including ITO, [1][2][3] fluorine doped tin oxide (FTO), [4][5][6] gallium doped zinc oxide (GZO) 7,8 and AZO [9][10][11] are strongly dependent on film thickness. ITO is often preferred for its excellent properties but its cost is high due to increasing demand for displays, solar cells, and smart windows.…”