Thickness-dependent structural transformation in the AlN film

Chen, D.; Ma, Xiang; Wang, Y.M.

doi:10.1016/j.actamat.2005.08.003

Cited by 20 publications

(3 citation statements)

References 29 publications

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“…In superlattice systems, the particular crystal structure of AlN layer strongly depends on its layer thickness [20,29]. Cubic structured AlN is stable only when the layer thickness is ≤3.0 nm; for larger thicknesses wurtzite AlN will form [29][30][31][32][33]. It is therefore anticipated that the structure of AlN can be controlled by suitable growth conditions, such as the substrate crystal structure, substrate orientation, and lattice as well as elastic mismatch between the individual layers.…”

Section: Introductionmentioning

confidence: 98%

The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti–Al–N superlattices

2014

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Section: Introductionmentioning

confidence: 98%

The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti–Al–N superlattices

2014

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“…Therefore, the present work focuses to modelling the misfit strain or coherency stress between TiN and AlN layers in TiN/AlN bilayer and multilayer films by finite element method (FEM) using a commercial package, ABAQUS 6.10-1 [9] . The TiN/AlN system was chosen for the investigation as this system is highly interesting from fundamental as well as from the application point of view [10] , [11] .…”

Section: Introductionmentioning

confidence: 99%

Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

Chawla

Holec

Mayrhofer

2012

Computational Materials Science

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Highlights► AlN and TiN layers are always in tension and compression at interface, respectively. ► Curvature of the bending is largest for the TiN/AlN thickness ratios ∼0.5 and ∼2. ► Curvature is maximum for equal number of TiN and AlN layers in multilayer film. ► Curvature is decreases with increasing the no. of TiN/AlN periods in multilayer film. ► Top layer and sample geometry plays critical role on the coherency stress profile.

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“…The metastable B1-phase can also be stabilized under ambient pressures by coherency strains, to lattice matched materials, but only up to a thickness of a few nm. [4][5][6][7][8][9][10][11] Consequently, there is no straightforward way to experimentally characterize the properties of B1-AlN.…”

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confidence: 99%

Thermal expansion of rock-salt cubic AlN

Bartosik

Todt

Holec

et al. 2015

Applied Physics Letters

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We combine continuum mechanics modeling and wafer curvature experiments to characterize the thermal expansion coefficient of AlN in its metastable cubic rock-salt (B1) structure. The latter was stabilized as nm thin layers by coherency strains in CrN/AlN epitaxial multilayers deposited on Si (100) substrates using reactive magnetron sputtering. The extraction of the B1-AlN thermal expansion coefficient, from experimentally recorded temperature dependent wafer curvature data, is formulated as an inverse problem using continuum mechanics modeling. The results are cross-validated by density functional theory calculations.

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Thickness-dependent structural transformation in the AlN film

Cited by 20 publications

References 29 publications

The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti–Al–N superlattices

The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti–Al–N superlattices

Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis

Thermal expansion of rock-salt cubic AlN

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