2017
DOI: 10.7567/jjap.56.031201
|View full text |Cite
|
Sign up to set email alerts
|

Thickness-dependent structure and properties of SnS2thin films prepared by atomic layer deposition

Abstract: Tin disulfide (SnS2) thin films were deposited by a thermal atomic layer deposition (ALD) method at low temperatures. The physical, chemical, and electrical characteristics of SnS2 were investigated as a function of the film thickness. SnS2 exhibited a (001) hexagonal plane peak at 14.9° in the X-ray diffraction (XRD) results and an A1g peak at 311 cm−1 in the Raman spectra. These results demonstrate that SnS2 thin films grown at 150 °C showed a crystalline phase at film thicknesses above 11.2 nm. The crystall… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1

Citation Types

2
22
1

Year Published

2018
2018
2022
2022

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 31 publications
(25 citation statements)
references
References 32 publications
2
22
1
Order By: Relevance
“…Futhermore, the thin film has exhibited an absorption coefficient (α) of 10 4 cm -1 . The Eg value has been reported around 1.3 eV for SnS and 2.4 for SnS2 thin film (Seo et al, 2017;Wang et al, 2017). Therefore, the Eg and α values of the SnS2 thin film are in good aggreement with those reported previously (Reddy et al, 2018).…”
Section: Methodssupporting
confidence: 76%
See 1 more Smart Citation
“…Futhermore, the thin film has exhibited an absorption coefficient (α) of 10 4 cm -1 . The Eg value has been reported around 1.3 eV for SnS and 2.4 for SnS2 thin film (Seo et al, 2017;Wang et al, 2017). Therefore, the Eg and α values of the SnS2 thin film are in good aggreement with those reported previously (Reddy et al, 2018).…”
Section: Methodssupporting
confidence: 76%
“…It is calibrated using a certified silicon reference cell, with a Keithley 2400 source-meter unit inside the glove box. 001) and ( 002) crystallographic planes of hexagonal phases, respectively (Seo et al, 2017;. The values of Full Width at Half Maximum (FWHM) of the dominant peaks have determined to obtain average grain size.…”
Section: Methodsmentioning
confidence: 99%
“…3a). The 3d 5/2 transition was deconvoluted into three peaks at BE values 483.8 eV, 485.6 eV, and 486.5 eV, corresponding to the Sn oxidation state of 0, + 2 and + 4, respectively 11,12 . The XPS analysis suggests that the dominant phase is SnS for the thin film deposited at 180 °C; however, the formation of metallic Sn in notable quantities was also evident.
Figure 3X-ray photoelectron spectroscopy spectra of Sn 3d region for ( a ) SnS x @NF-180 and ( b ) SnS x @NF-160; S 2p region for ( c ) SnS x @NF-180 and ( d ) SnS x @NF-160.
…”
Section: Resultsmentioning
confidence: 99%
“…So far, only a single research group has deposited SnS 2 by ALD using Sn(NMe 2 ) 4 and H 2 S as precursors at 150 °C with improved film quality achieved through postdeposition annealing in S or H 2 S atmosphere. Nevertheless, many crucial features of film deposition, including conformality, uniformity, and thickness control have not been demonstrated for 2D SnS 2 films.…”
Section: Introductionmentioning
confidence: 99%