2017
DOI: 10.1063/1.4974321
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Thickness dependent thermal conductivity of gallium nitride

Abstract: As the size of gallium nitride (GaN) transistors is reduced in order to reach higher operating frequencies, heat dissipation becomes the critical bottleneck in device performance and longevity. Despite the importance of characterizing the physics governing the thermal transport in thin GaN films, the literature is far from conclusive. In this letter, we report measurements of thermal conductivity in a GaN film with thickness ranging from 15–1000 nm grown on 4H-SiC without a transition layer. Additionally, we m… Show more

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Cited by 82 publications
(57 citation statements)
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“…The thermal conductivity is the key material parameter of such heat flux computations. It is relatively high in perfect GaN crystals, but drops significantly due to phonon scattering at dopants [ 114 ], defects [ 115 ], and interfaces [ 116 ]. Bulk ternary layers suffer from strong alloy scattering of phonons ( Figure 11 ) [ 117 ].…”
Section: Self-heating Modelsmentioning
confidence: 99%
“…The thermal conductivity is the key material parameter of such heat flux computations. It is relatively high in perfect GaN crystals, but drops significantly due to phonon scattering at dopants [ 114 ], defects [ 115 ], and interfaces [ 116 ]. Bulk ternary layers suffer from strong alloy scattering of phonons ( Figure 11 ) [ 117 ].…”
Section: Self-heating Modelsmentioning
confidence: 99%
“…These interfacial modes can significantly enhance thermal boundary conductance. b) Experimentally measured thermal boundary conductance versus ratio of the elastic moduli of the two constituent materials (Si/SiO 2 , SiO 2 /Al 2 O 3 , Al/Diamond, Pt/Diamond, Al/SiC, Au/GaN, Al/Ge, GaN/SiC, TiN/MgO, SRO/STO, Pt/Al 2 O 3 , ZnO/GaN, ZnO/HQ/ZnO, Si/vdW (van der Waals interface)/Si, Bi/Si, Mo/Si, Al/Si, Ni/Si, Cr/Si, Pt/Si, Au/Si, NiSi/Si and CoSi 2 /Si).…”
Section: Introductionmentioning
confidence: 99%
“…[13][14][15][16] In addition, nothing is known about the effect of layer thickness and phonon-boundary scattering in a) Electronic mail: dat.tran@liu.se Al x Ga 1−x N. The latter have been shown to play a critical role for GaN, where significant reduction of thermal conductivity with decreasing film thickness was observed. 17,18 We note that Al x Ga 1−x N layers with variable thicknesses are needed for optimizing thermal resistance across HEMT, Schottky diode, and p-i-n diode structures for power devices.…”
mentioning
confidence: 99%