Thickness Determination of Thin Insulating Layers

Klein, Peter; Röhrbacher, Kurt; Andrae, Michael; Wernisch, J.

doi:10.1007/978-3-7091-6555-3_30

Cited by 1 publication

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“…Since charging in nonconducting materials modifies the shape of the depth distribution functions, the EPMA of insulators is difficult. One first step toward thickness determination in nonconducting materials has been taken by Klein et al (1996).…”

Section: Introductionmentioning

confidence: 99%

Calculation of concentration depth profiles in electron probe microanalysis

et al. 1997

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Summary: Based on a multiple reflection model, the concentration depth profiles of gold diffused into a silver substrate are determined. To conclude the structure of the sample from the measured intensity of radiation, an accurate correction procedure is necessary. A new model was developed for this purpose. Since the new electron probe microanalysis (EPMA) correction procedure is also valid for tilted samples, measurements with different geometries could be performed. The different angles of incidence and take-off angles allow for a better comparison of theory with experiment. One advantage of the applied multiple reflection model is that it can be extended comparatively easily with the analysis of layered specimens. Measurements of some specimens with one layer on a substrate are reported. The mean deviation of calculated thicknesses is about 10%. To calculate depth profiles, gold was evaporated with physical vapor deposition on silver foils. The thicknesses of evaporated gold films were 50 and 100 nm. Then the specimens were annealed at a temperature of approximately 400°C. Finally, the concentration depth profiles were quantified with EPMA. The shape of the profiles was derived from a simple diffusion model valid for the samples under consideration. To check the shape of the functions obtained, a comparison with measurements by secondary ion mass spectrometry was performed.

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Section: Introductionmentioning

confidence: 99%