Thickness Distribution Model of Condensate on Rotary Substrate by EB-PVD

Abstract

Large-size Ni-based alloy sheet was prepared by electron beam physical vapor deposition (EB-PVD). Thickness uniformity of large-size sheet for application is important. Based on the Knudsen’s cosine law and the character of the evaporation during EB-PVD, thickness distribution model of condensate on rotary substrate by EB-PVD was established. The thickness model is not consistent with the traditional cosine law, but cosnθ relationship, n=5.3 in this paper. The predicted data of thickness model agrees well with the measured data. The thickness distribution model is not limited to specific vapor source material, therefore, it provides significant insight on the thickness distribution profile for film, coating and sheet deposited on the rotary substrate by EB-PVD.