2015
DOI: 10.1080/15685543.2015.1002259
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Thickness effect on stress, structural, electrical and sensing properties of (0 0 2) preferentially oriented undoped ZnO thin films

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Cited by 43 publications
(22 citation statements)
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“…The thickness varied from 10 nm to 1200 nm. All the deposition conditions are summarized in a previous work 21 .…”
Section: Methodsmentioning
confidence: 99%
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“…The thickness varied from 10 nm to 1200 nm. All the deposition conditions are summarized in a previous work 21 .…”
Section: Methodsmentioning
confidence: 99%
“…The stoichiometry (O/Zn about 1) was verified by EDX analysis. residual stress is a compressive stress that decreases with increasing thickness 21 .…”
Section: Methodsmentioning
confidence: 99%
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“…ZnO belongs to the transparent conductive oxides group (TCO) and doping ZnO on the other hand, can be achieved by adding a small amount of group III elements (such as B, Al, In or Ga) or IV elements (such as Pb, Se), and various deposition techniques have been performed to prepare doped ZnO thin lms [20,21]. Among the preparation methods, magnetron sputtering has been the most widely utilized since it enables working at low temperatures and provides deposits of improved adhesion and higher density than other methods [22]. Most importantly, ZnO can be band-gap engineered by alloying it with MgO and CdO to increase and decrease its energy band gap respectively [23], so that its optoelectronic properties may be ddled with.…”
Section: Introductionmentioning
confidence: 99%