Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

Guiyun, 李桂运 Li; Liyuan, 谷利元 Gu; Jingpei, 胡敬佩 Hu; Linglin, 朱玲琳 Zhu; Aijun, 曾爱军 Zeng; Huijie, 黄惠杰 Huang

doi:10.3788/cjl201946.0204010

中国激光

2019

DOI: 10.3788/cjl201946.0204010

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Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

李桂运 Li Guiyun¹,

谷利元 Gu Liyuan²,

胡敬佩 Hu Jingpei³

et al.

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Thickness Measurement Method of Metallic Thin Film Based on SPR Effect Generated by Cylindrical Lens with Otto Configuration

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