2007
DOI: 10.1007/s00542-006-0353-2
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Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL

Abstract: In this paper, we propose a novel optics design for improving the thickness tolerance of a super-hemispherical solid immersion lens (SIL) that is usually used in near-field recording for high data density. To obtain the improved thickness tolerance of a SIL and a high numerical aperture simultaneously, an aspheric replicated lens is added on the SIL. Using an additional aspheric replicated lens, spherical aberration which induces the tight thickness tolerance of the SIL is effectively reduced, therefore it was… Show more

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Cited by 3 publications
(3 citation statements)
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“…A replicated surface is commonly used for the fabrication of optical storage device lenses. 9) In general, the possible range of the replicated lens thicknesses for fabrication is from 50 to 200 mm. The designed replicated surface has a center thickness of 50 mm and periphery thickness of 63.9 mm.…”
Section: Design Of Compatible Opticsmentioning
confidence: 99%
“…A replicated surface is commonly used for the fabrication of optical storage device lenses. 9) In general, the possible range of the replicated lens thicknesses for fabrication is from 50 to 200 mm. The designed replicated surface has a center thickness of 50 mm and periphery thickness of 63.9 mm.…”
Section: Design Of Compatible Opticsmentioning
confidence: 99%
“…To achieve these targets, it is essential to reduce the spherical aberration sensitivity for variations in SIL thickness. 8) Thus, we add an aspherical replicated lens to the SIL as shown in Fig. 2.…”
Section: Novel Sil Optical Head Designmentioning
confidence: 99%
“…Solid immersion lens fabrication has been difficult due to the small thickness tolerance required. To improve SIL fabrication with increasing thickness tolerance, hybrid SILs and ways of reducing the sensitivity to a spherical aberration in the SIL thickness have been researched (Yoon et al 2007(Yoon et al , 2008. Another important technology in NFR is the SIL optical head assembly.…”
Section: Introductionmentioning
confidence: 99%