Manipulating fluids in micro to nano-liter volumes poses significant challenges, due to the dominance of surface forces with increasingly large surface to volume ratios. Commonly, external pumps or precisely micromachined on-chip pumps were used to generate pressure gradients to induce fluid motion. Alternatively, the wettability of a surface can be manipulated by an applied electric field. This phenomenon, known as electrowetting, consists in the spread of a liquid drop placed on an electrode upon application of a voltage. Electrowetting based devices flourished upon the discovery that an added dielectric layer between the drop and a conductive electrode would tolerate the application of large voltages, allowing for significant contact angle change. Several current commercial devices exploiting this effect include electro-optic displays, electronic paper, and variable focus lenses.Additionally, electrowetting has achieved particular prominence in lab-on-a-chip applications, controlling drop transport across patterned electrode structures.Initially, polymers were utilized as the dielectric layer preventing current flow between the fluid and electrode, while providing a hydrophobic surface to minimize the resistance of drop movement.However, these layers were typically in excess of one micron thickness. As a consequence, these layers required over 100 Volts to achieve appreciable contact angle change. This dissertation aims to reduce the voltage dependence for contact angle change by optimization of a dual layer structure utilizing a dielectric and hydrophobic layer. The dielectric layer uses aluminum and tantalum oxides (15-44 nm thick) formed by electrochemical anodization. The electronic and ionic conduction, breakdown characteristics, and dielectric properties of these films were studied in detail, achieving a comprehensive understanding of the charge transport and failure mechanisms. Three hydrophobic layer were investigated: a commercial fluoropolymer Cytop, and two self-assembled monolayers 3