1997
DOI: 10.1109/23.603723
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Thin detectors for the CHICSi /spl Delta/E-E telescope

Abstract: flag) at the rear of the telescope is used to identify high energy A pilot series of 10 p to 15 p thin silicon detectors has been made for the AE-E telescopes in the CHICSi detector system. This system will operate at the CELSIUS heavy ion storage ring in Uppsala, Sweden. AE-E telescopes provide

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Cited by 37 publications
(9 citation statements)
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“…A third possibility is to etch small, thin windows in normal wafers [11,12]. The detector structures are then built on these thinned windows.…”
Section: Thinningmentioning
confidence: 99%
“…A third possibility is to etch small, thin windows in normal wafers [11,12]. The detector structures are then built on these thinned windows.…”
Section: Thinningmentioning
confidence: 99%
“…The solution for producing ultra-thin (10pm) Si detectors in large quantity was an anisotropic, temperature controlled, TMAH (tetramethylammonium hydroxide) etching of high resistivity, P-doped, 280pm Si wafers [6]. Because of uncertainty about the thickness homogeneity and the leakage current for such thin, high capacity detectors, 14pm and 12pm detectorswere first tried out.…”
Section: The Chicsi Detectormentioning
confidence: 99%
“…The application of different planar silicon detectors to the detection of charged particles has been reported widely in the literature [1][2][3]. Specially devised PIN photodiodes have been reported for charged particle spectroscopy [4] and also for use in heavy ion collision experiments [5,6].…”
Section: Introductionmentioning
confidence: 99%