Thin film enabling sub-250 nm nano-ripples on glass by low fluence IR picosecond laser irradiation

Femtosecond LIPSS on indium-tin-oxide thin films at IR wavelengths

“…Focusing onto the patterning of ITO thin films, previous works reported LIPSS generation in a wide range of experimental conditions regarding the laser wavelengths, pulse duration and repetition rate. Using pulses with central wavelengths between 532 and 1032 nm both in the fs and ps regime resulted in HSFL formations with periodicities between 150 and 350 nm with perpendicular orientation [16][17][18][19][20]. Overall, the reported periodicities and the resulting morphologies are similar and show minor dependence on the incident laser wavelength in the previously investigated visible and near-infrared range.…”

Femtosecond LIPSS on indium-tin-oxide thin films at IR wavelengths

“…Subsequent pulses interacting with these defects result scattered waves that interfere with each other, hence forming an intensity pattern that leads to the HSFL ripples. Also, the formation of periodic structures on glass surface under the ITO or ZnS layer was reported before [14,15]. In these cases, it was found that the underlying glass surface could be nano-fabricated using fluences amounting to ~25% of the ablation threshold of the glass.…”

Large-Area Fabrication of Laser-Induced Periodic Surface Structures on Fused Silica Using Thin Gold Layers

“…Alternative approaches of large-area structuring are therefore based on dot-structures, hierarchical surface structures, and single-spot matrixes [ 20 , 21 , 22 , 23 ]. Furthermore, the application of metallic and semiconducting thin films, deposited on the substrate surface prior to laser structuring, was demonstrated to be advantageous for the formation of LIPSS on large bandgap materials including sapphire [ 24 , 25 ], glasses [ 26 , 27 ], and silicon [ 28 ]. Here, we report on the use of thin gold layers (≤300 nm) to enable the fabrication of homogenous, large-area LIPSS pattern on fused silica substrates.…”