Thin-Film Formation by Pulsed-Laser Deposition and Laser-Induced Evaporation

Bäuerle, D.

doi:10.1007/978-3-642-17613-5_22

Cited by 5 publications

(2 citation statements)

References 168 publications

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“…This can be due to a change in the density of the target and therefore its thermal conductivity, which depends on the impurity composition. 18,19 The data reported in Table I shows that the Gd concentration in the films is slightly different from that in the corresponding targets. It is known that the transfer ratio of the species from the target to the film depends on the type of the atoms.…”

Section: Resultsmentioning

confidence: 95%

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Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Flemban

Sequeira

Zhang

et al. 2016

Journal of Applied Physics

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Gd-doped ZnO thin films were prepared using pulsed laser deposition at different oxygen pressures and varied Gd concentrations. The effects of oxygen deficiency-related defects on the Gd incorporation, optical and structural properties, were explored by studying the impact of oxygen pressure during deposition and post-growth thermal annealing in vacuum. Rutherford Backscattering Spectrometry revealed that the Gd concentration increases with increasing oxygen pressure for samples grown with the same Gd-doped ZnO target. Unexpectedly, the c-lattice parameter of the samples tends to decrease with increasing Gd concentration, suggesting that Gd-defect complexes play an important role in the structural properties. Using low-temperature photoluminescence (PL), Raman measurements and density functional theory calculations, we identified oxygen vacancies as the dominant intrinsic point defects. PL spectra show a defect band related to oxygen vacancies for samples grown at oxygen deficiency. V C 2016 AIP Publishing LLC.

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Section: Resultsmentioning

confidence: 95%

“…In addition, the gaseous pressure and the laser fluence on the target affect the transfer ratio, depending on the mass and charge state of the transferred ions. 18 Figure 1(b) shows RBS spectra for samples D1, D2, and D3 grown with the same GdZnO target but under different oxygen pressures (Set 2). The fit results are summarized in Table I.…”

Section: Resultsmentioning

confidence: 99%

Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Flemban

Sequeira

Zhang

et al. 2016

Journal of Applied Physics

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Super growth of vertically aligned carbon nanotubes on pulsed laser deposited catalytic thin films

et al. 2015

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Study of deposition parameters for the fabrication of ZnO thin films using femtosecond laser

et al. 2016

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Femtosecond (fs) pulsed laser deposition (fs-PLD) of ZnO thin film on borosilicate glass substrates is reported in this work. The effect of important fs-PLD parameters like targetsubstrate distance, laser pulse energy, and substrate temperature on structure, morphology, optical transparency and luminescence of as deposited films is discussed.XRD analysis reveals that all the films grown using the laser energy range 120 J to 230 J are polycrystalline when they are deposited at room temperature in a ~ 10 -5 Torr vacuum. Introducing 0.7 mTorr oxygen pressure, the films show preferred c-axis growth and transforms into a single crystal like film when the substrate temperature is increased to 100 °C. The Scanning Electron Micrographs show the presence of sma ll nano size grains at 25 °C, which grow in size to the regular hexagonal shape particles at 100 °C.Optical transmission of the ZnO film is found to increase with an increase in crystal quality.Maximum transmittance of 95% in the wavelength range 400-1400 nm is achieved for films deposited at 100 °C employing a laser pulse energy of 180 J. The luminescence spectra show a strong UV emission band peaked at 377 nm close to the ZnO band gap.The shallow donor defects increase at higher pulse energies and higher substrate temperatures, which give rise to violet-blue luminescence. The results indicate that nanocrystalline ZnO thin films with high crystalline quality and optical transparency can be fabricated by using pulses from fs lasers.

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Thin-Film Formation by Pulsed-Laser Deposition and Laser-Induced Evaporation

Cited by 5 publications

References 168 publications

Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Identifying the influence of the intrinsic defects in Gd-doped ZnO thin-films

Super growth of vertically aligned carbon nanotubes on pulsed laser deposited catalytic thin films

Study of deposition parameters for the fabrication of ZnO thin films using femtosecond laser

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