distributed parameters in SC films as a function of the local critical current [27]. It is possible to manifest local resistive characterization of the SC transition [28][29][30], the spatial variations of magnetic and electromagnetic fields [31][32][33][34], and to carry out 2-D defectoscopy of structural and technological faults in operating SC devices and circuits [35][36][37]. In this work, we apply the LTLSM technique to analyze the redistribution of rf current flow in the vicinity of typical microdefects in YBCO films leading to anomalously high rf photoresponse, and possibly to nonlinear microwave behavior of SC devices. We have used the LTLSM technique for a spatially resolved investigation of the microwave transport properties, nonlinearities and material inhomogeneities in an operating coplanar waveguide YBa2Cu3O7-d (YBCO) microwave resonator on an LaAlO3 (LAO) substrate. The influence of twin-domain blocks, inplane rotated grains, and micro-cracks in the YBCO film on the nonuniform rf current distribution were measured with a micrometer-scale spatial resolution. The impact of the peaked edge currents and rf field penetration into weak links on the linear device performance were studied as well. The LTLSM capabilities and its future potential for non-destructive characterization of the microwave properties of superconducting circuits are discussed