Thin-film magnetically soft Fe-Zr-N alloys with high saturation induction

FeZrN Films: Magnetic and Mechanical Properties Relative to the Phase-Structural State

“…For the study, films of six series I, II, III, IV, V, and VI were prepared ( Table 1 ). The calculated composition was supposed to produce films containing about 10 mol.% ZrN (films III), which are characterized, according to our earlier data [ 24 , 33 ], by the high saturation induction Bs and low coercive field Hc ; films II, IV, V with a lower Zr content, as compared to that in films III, and the ratio at.% N/at.% Zr = 1–2 were taken to obtain a higher saturation induction Bs as compared to that of films III; Fe films (I) and films with a high Zr content (VI) were taken to obtain diffraction patterns from the material in crystalline and amorphous state, respectively.…”

“…For the study, films of six series I, II, III, IV, V, and VI were prepared (Table 1). The calculated composition was supposed to produce films containing about 10 mol.% ZrN (films III), which are characterized, according to our earlier data [24,33], by the high saturation induction Bs and low coercive field Hc; films II, IV, V with a lower Zr content, as compared to that in films III, and the ratio at.% N/at.% Zr = 1-2 were taken to obtain a higher saturation induction Bs as compared to that of films III; Fe films (I) and films with a high Zr content (VI) were taken to obtain diffraction patterns from the material in crystalline and amorphous state, respectively. The films were deposited onto glass and metallic (Ni-Cr alloy) substrates by dc reactive magnetron sputtering of a heated Fe 1-x Zr x composite target in Ar, Ar + 5% N 2 and Ar + 15% N 2 atmospheres (Table 1) and subsequent vacuum annealing (at the residual pressure p = 2.4-4.2•10 −4 Pa) at 300, 400, 500, and 600 • C, exposure 1 h. The films as-sputtered and annealed at 400, 500, and 600 • C (excluding films IV that were annealed at 400 and 500 • C) were studied.…”

“…Since the early 2000s, the authors of the presented work have been carried out studies of the Fe-Me IVa -X system soft-magnetic films (Fe-Zr-C, Fe-Zr-N and Fe-Ti-B) [ 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ], wherein the large amount of systematic and comprehensive experimental data on Fe-Zr-N films were obtained [ 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ]. The studied film compositions were chosen using the physical-chemical approach to the alloy design in order to ensure the formation of a two-phase structure (αFe-based phase + MeX) under appropriate preparation conditions of the film [ 32 ].…”

Annealing effect on magnetostatic properties of nanocomposite Fe‐Zr‐N films

“…Such films are promising candidates for practical applications in devices of modern microelectronics as a high-frequency (f > 100 MHz) field-amplifying components, in particular, as an ideal recording head pole materials as well as shields for magneto-resistive sensors. The most of these investigations was centred on the iron-rich FeXN alloys, where X represents any of a variety of elements including Al, Si, Ta, Hf and Zr [1][2][3][4][5][6]. The indicated elements are usually added to improve the thermal stability of binary FeN alloys, but they also affect their magnetic properties.…”

Effects of Heat Treatment Conditions on Magnetic Properties and Structural Features of Nanocrystalline Fe₇₉Zr₁₀N₁₁ Films

“…located at the grainboundaries of the α-Fe-based phase [3]. The Fe-Zr-N films (classified among the aforementioned films) produced by magnetron sputtering were studied in [3][4][5][6]. Nanocrystallization process is realized in the films during the annealing at 400 -600 0 C for 1 h., which results in both the increase in saturation magnetization up to 1.8 T and decrease in the coercive force up to 0.3-0.4 Oe as compared to those of as-sputtered films.…”