Thin-Film Piezoelectric Materials For a Better Energy Harvesting MEMS

Wasa, Kiyotaka; Matsushima, Toshiya; Adachi, Hideaki; Kanno, Isaku; Kotera, Hidetoshi

doi:10.1109/jmems.2011.2181156

Cited by 77 publications

(41 citation statements)

References 22 publications

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“…These highperformance ferroelectric properties will be useful for the fabrication of improved piezoelectric thin film devices and/or MEMS including wide-band FBAR filters for mobile communications and compact energy harvesting piezoelectric devices. 35,36 As for wide-band GHz filters, 10%PMnN-PZT(55/ 45) thin films can be used to fabricate 3-GHz filter with 1-GHz bandwidth, based on the high coupling, k t $ 0.62. 24,37 IV.…”

Section: B Possible Applications Of Pzt-based Thin Filmsmentioning

confidence: 99%

High-Tc/high-coupling relaxed PZT-based single crystal thin films

Wasa

Matsushima

Adachi

et al. 2015

Journal of Applied Physics

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Pb(Zr,Ti)O3 (PZT)-based ferroelectric ceramics exhibit high piezoelectricity, however, their Curie temperature (Tc) values are not so high, i.e., Tc < 400 °C. PZT-based piezoelectric thin films with higher Tc would be beneficial for improved micro actuators, sensors, memories, and piezoelectric micro-electro mechanical systems. In-plane biaxial strained PZT thin films in a laminated composite structure are known to exhibit enhanced Tc; however, the thickness of PZT-based thin films is limited to below a critical thickness typically <50 nm. The Tc of relaxed PZT-based thin films with thicknesses greater than the critical thickness is the same as bulk Tc. However, a sort of relaxed PZT-based single-crystal thin films exhibit extraordinary high Tc, Tc = ∼600 °C. In addition, the films show extremely low dielectric constant, ɛ/ɛo ∼ 100 with high coupling factor, kt ∼ 0.7, and large remnant polarization, Pr ∼ 100 μC/cm2. These exotic properties would result from the single-domain/single-crystal structure. The enhanced Tc is possibly caused by the highly stable interface between the PZT-based thin films and substrates. Their ferroelectric performances are beyond those of conventional PZT. The high-Tc/high-coupling performances are demonstrated, and the possible mechanisms of the high Tc behavior in relaxed PZT-based single-crystal thin films are discussed.

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Section: B Possible Applications Of Pzt-based Thin Filmsmentioning

confidence: 99%

High-Tc/high-coupling relaxed PZT-based single crystal thin films

Wasa

Matsushima

Adachi

et al. 2015

Journal of Applied Physics

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“…However, their also high dielectric constant counterbalances these advantages in terms of the power output. 7 Accordingly, materials with power outputs similar to that of PZT recently received more scientific and technological interest. Aluminum nitride (AlN) based thin films offer promising alternatives due to AlN's comparable power output coupled with an extremely high Q value.…”

Section: Introductionmentioning

confidence: 99%

Volume matching condition to establish the enhanced piezoelectricity in ternary (Sc,Y)0.5(Al,Ga,In)0.5N alloys

et al. 2013

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Recently, ScAlN alloys attracted attention for their giant piezoelectric moduli. In this study the piezoelectric response of the wurtzite group-III nitrides AlN, GaN, and InN mixed with 50 mol% of ScN or YN is investigated using ab initio calculations. We confirm that the energy flattening phenomenon gives rise to the simultaneous appearance of elastic softening and local structural instability, and explains the enhanced piezoelectricity of the alloys. Furthermore, we present a volume matching condition for an efficient search of new piezoelectric materials. It states that alloys in which the parent components show close volume matching exhibit a flatter potential-energy landscape and higher increase of piezoelectric moduli. We suggest YInN, beyond ScAlN, as a promising material for piezoelectric energy harvesting with its enhanced ≈400% piezoelectric moduli.

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“…Similar works on the modeling, design, fabrication, and simulations of shaped cantilevered structure MEMSbased piezoelectric power harvesters were conducted by other authors (Marzencki et al 2005(Marzencki et al , 2008Shen et al 2008;Renaud et al 2008;Fang et al 2006;Liu et al 2008;Jeon et al 2005;Lee et al 2007Lee et al , 2009Muralt et al 2009;Elfrink et al 2009;Littrell & Grosh 2012;Lallart et al 2012;Park et al 2010;Liu et al 2011;Wasa et al 2012;Tabesh & Frechette, 2010).…”

Section: Introductionmentioning

confidence: 57%

Micro-Electro-Mechanical System (MEMS)-Based Piezoelectric Energy Harvester for Ambient Vibrations

Saadon

Sidek

2015

Procedia - Social and Behavioral Sciences

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The ambient vibration-based micro electromechanical systems (MEMS) piezoelectric harvester has become an important subject in most research publications. Providing a green and virtually infinite alternative power source to traditional energy sources, this harvester will significantly expand the applications of wireless sensor networks and other technologies. Using piezoelectric materials to harvest the ambient vibrations that surround a system is one method that has seen a dramatic rise in the powerharvesting applications. The simplicity associated with piezoelectric micro-generators makes them very attractive for MEMS applications in which ambient vibrations are harvested and converted into electric energy. These micro generators can become an alternative to the battery-based solutions in the future, especially for remote systems. In this paper, we proposed a model and presented the simulation of a MEMS-based arrayed energy harvester under ambient vibration excitation using the Coventorware approach. This arrayed cantilever-based MEMS energy harvester that operates under ambient excitation of frequency band of 67 to 70 Hz, within a base acceleration of 0.2 to 1.3g produces an output power of 6.8 w and 0.4 volts at 20.1 k-ohms load.

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Thin-Film Piezoelectric Materials For a Better Energy Harvesting MEMS

Cited by 77 publications

References 22 publications

High-Tc/high-coupling relaxed PZT-based single crystal thin films

High-Tc/high-coupling relaxed PZT-based single crystal thin films

Volume matching condition to establish the enhanced piezoelectricity in ternary (Sc,Y)0.5(Al,Ga,In)0.5N alloys

Micro-Electro-Mechanical System (MEMS)-Based Piezoelectric Energy Harvester for Ambient Vibrations

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