2015
DOI: 10.5194/jsss-4-91-2015
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Thin film sensors for measuring small forces

Abstract: Abstract. Especially in the case of measuring small forces, the use of conventional foil strain gauges is limited. The measurement uncertainty rises by force shunts and is due to the polymer foils used, as they are susceptible to moisture. Strain gauges in thin film technology present a potential solution to overcome these effects because of their direct and atomic contact with the measuring body, omitting an adhesive layer and the polymer foil.For force measurements up to 1 N, a suitable deformation element w… Show more

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