Thin-film temperature sensor made from polymer-derived ceramics based on laser pyrolysis

Cui, Zaifu; Chen, Xiaojun; Li, Xin; Sui, Guangzhou

doi:10.1016/j.sna.2022.114144

Cited by 6 publications

(1 citation statement)

References 23 publications

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“…The Si-C-N has shown stability up to 1600C and it remains in the amorphous state up to 1500 o C. These properties make silicon carbonitride a promising material for prospective applications such as structural ceramics, MEMS, hard protective coatings, and electronic materials [23]. Si-C-N is being currently looked for the absorption of electromagnetic waves (shielding) [24][25][26][27], as thin film pressure and temperature sensors [28][29][30][31], as a bonding layer for memory devices [32] MEMS magnetic devices [33] and even in endodontics [34]. It has also been reported to show both metallic and piezoelectric properties and is a good alternative to SiC which only has insulating properties [35][36][37][38][39].…”

Section: Introductionmentioning

confidence: 99%

Elemental Dissolution in Multicomponent PDC Based Mixed-Phase Hard Films

Bhattacharyya

2024

Preprint

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Due to the high temperature limitation associated with silicon, SiC, Si3N4, TiC, TiN, TiB2, cBN, CNx, SiO2, Al2O3 and novel multicomponent nanocomposites polymer derived ceramics (PDC) based thin films like Si-C-N, Ti-Si-B-C-N and Si-O-CN that are compatible with silicon and have a wider range of operation in ambient conditions are being investigated. Apart from small scale electro-mechanical devices like N/MEMS, sensors, areas like metallurgical protection, water purification, energy storage, bio medical implants and aerospace have been benefited. The cross-sectional study involving the role of oxygen and nitrogen dissolution at different interfacial configurations has been presented.

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